The effect of edge compliance on the contact between a spherical indenter and a high-aspect-ratio rectangular fin.

Stan, Gheorghe; Mays, Ebony; Yoo, Hui Jae; King, Sean W

Stan, Gheorghe; Mays, Ebony; Yoo, Hui Jae; King, Sean W.

Afiliación

Stan G; Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA.
Mays E; Logic Technology Development, Intel Corporation, Hillsboro, OR 97124, USA.
Yoo HJ; Components Research, Intel Corporation, Hillsboro, OR 97124, USA.
King SW; Logic Technology Development, Intel Corporation, Hillsboro, OR 97124, USA.

Exp Mech ; 58(7)2018.

Article en En | MEDLINE | ID: mdl-35529526

Palabras clave

conjugate gradient method; contact resonance atomic force microscopy; edge compliance; nanoscale contact mechanics

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Texto completo: 1 Banco de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: Exp Mech Año: 2018 Tipo del documento: Article País de afiliación: Estados Unidos

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