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Investigation of the Effects of Pulse-Atomic Force Nanolithography Parameters on 2.5D Nanostructures' Morphology.
Pellegrino, Paolo; Farella, Isabella; Cascione, Mariafrancesca; De Matteis, Valeria; Bramanti, Alessandro Paolo; Della Torre, Antonio; Quaranta, Fabio; Rinaldi, Rosaria.
Afiliación
  • Pellegrino P; Department of Mathematics and Physics "Ennio De Giorgi", University of Salento, Via Monteroni, 73100 Lecce, Italy.
  • Farella I; Institute for Microelectronics and Microsystems (IMM), CNR, Via Monteroni, 73100 Lecce, Italy.
  • Cascione M; Department of Mathematics and Physics "Ennio De Giorgi", University of Salento, Via Monteroni, 73100 Lecce, Italy.
  • De Matteis V; Department of Mathematics and Physics "Ennio De Giorgi", University of Salento, Via Monteroni, 73100 Lecce, Italy.
  • Bramanti AP; STMicroelectronics S.r.l., System Research and Applications (SRA) Silicon Biotech, Lecce Labs, Via Monteroni, 73100 Lecce, Italy.
  • Della Torre A; Institute for Microelectronics and Microsystems (IMM), CNR, Via Monteroni, 73100 Lecce, Italy.
  • Quaranta F; Institute for Microelectronics and Microsystems (IMM), CNR, Via Monteroni, 73100 Lecce, Italy.
  • Rinaldi R; Department of Mathematics and Physics "Ennio De Giorgi", University of Salento, Via Monteroni, 73100 Lecce, Italy.
Nanomaterials (Basel) ; 12(24)2022 Dec 11.
Article en En | MEDLINE | ID: mdl-36558273
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Texto completo: 1 Banco de datos: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Año: 2022 Tipo del documento: Article País de afiliación: Italia
Texto completo
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Banco de datos: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Año: 2022 Tipo del documento: Article País de afiliación: Italia