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An On-Chip Microscale Vacuum Chamber with High Sealing Performance Using Graphene as Lateral Feedthrough.
Yu, Panpan; Zhan, Fangyuan; Rao, Weidong; Zhao, Yanqing; Fang, Zheng; Tu, Zidong; Li, Zhiwei; Guo, Dengzhu; Wei, Xianlong.
Afiliación
  • Yu P; Hunan Institute of Advanced Sensing and Information Technology, Xiangtan University, Xiangtan 411105, China.
  • Zhan F; School of Electronics, Peking University, Beijing 100871, China.
  • Rao W; School of Electronics, Peking University, Beijing 100871, China.
  • Zhao Y; School of Electronics, Peking University, Beijing 100871, China.
  • Fang Z; School of Electronics, Peking University, Beijing 100871, China.
  • Tu Z; Hunan Institute of Advanced Sensing and Information Technology, Xiangtan University, Xiangtan 411105, China.
  • Li Z; School of Electronics, Peking University, Beijing 100871, China.
  • Guo D; School of Electronics, Peking University, Beijing 100871, China.
  • Wei X; School of Electronics, Peking University, Beijing 100871, China.
Micromachines (Basel) ; 14(1)2022 Dec 29.
Article en En | MEDLINE | ID: mdl-36677145
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Texto completo: 1 Banco de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2022 Tipo del documento: Article País de afiliación: China
Texto completo
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Banco de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2022 Tipo del documento: Article País de afiliación: China