Optical gas sensing properties of thermally hydrocarbonized porous silicon Bragg reflectors.
Opt Express
; 17(7): 5446-56, 2009 Mar 30.
Article
en En
| MEDLINE
| ID: mdl-19333311
ABSTRACT
In the present work, porous silicon (PS) based Bragg reflectors are fabricated, and the reactive PS surface is passivated by means of thermal carbonization (TC) by acetylene decomposition. The gas sensing properties of the reflectors are studied with different gas compositions and concentrations. Based on the results it can be concluded that thermally carbonized Bragg reflectors provide an easy and inexpensive means to produce chemically stable high quality PS reflectors with good gas sensing properties, which differ from those of unpassivated PS reflectors.
Buscar en Google
Colección:
01-internacional
Asunto principal:
Refractometría
/
Silicio
/
Carbono
/
Técnicas Biosensibles
/
Dispositivos Ópticos
/
Gases
Tipo de estudio:
Diagnostic_studies
Idioma:
En
Revista:
Opt Express
Asunto de la revista:
OFTALMOLOGIA
Año:
2009
Tipo del documento:
Article
País de afiliación:
Finlandia