Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor.

Yuan, Zhenyu; Yang, Fan; Meng, Fanli

Yuan, Zhenyu; Yang, Fan; Meng, Fanli.

Afiliação

Yuan Z; College of Information Science and Engineering, Northeastern University, Shenyang 110819, China.
Yang F; State Key Laboratory of Synthetical Automation for Process Industries, Northeastern University, Shenyang 110819, China.
Meng F; Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology, Qinhuangdao 066004, China.

Micromachines (Basel) ; 13(3)2022 Mar 21.

Article em En | MEDLINE | ID: mdl-35334783

Palavras-chave

MEMS; micro-hotplate gas sensor; sensitive material coating

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Texto completo: 1 Coleções: 01-internacional Temas: Agentes_cancerigenos Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies / Prognostic_studies Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: China

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