Performance prediction for silicon photonics integrated circuits with layout-dependent correlated manufacturing variability.

This work develops an enhanced Monte Carlo (MC) simulation methodology to predict the impacts of layout-dependent correlated manufacturing variations on the performance of photonics integrated circuits (PICs). First, to enable such performance prediction, we demonstrate a simple method with sub-nanometer accuracy to characterize photonics manufacturing variations, where the width and height for a fabricated waveguide can be extracted from the spectral response of a racetrack resonator. By measuring the spectral responses for a large number of identical resonators spread over a wafer, statistical results for the variations of waveguide width and height can be obtained. Second, we develop models for the layout-dependent enhanced MC simulation. Our models use netlist extraction to transfer physical layouts into circuit simulators. Spatially correlated physical variations across the PICs are simulated on a discrete grid and are mapped to each circuit component, so that the performance for each component can be updated according to its obtained variations, and therefore, circuit simulations take the correlated variations between components into account. The simulation flow and theoretical models for our layout-dependent enhanced MC simulation are detailed in this paper. As examples, several ring-resonator filter circuits are studied using the developed enhanced MC simulation, and statistical results from the simulations can predict both common-mode and differential-mode variations of the circuit performance.

Sub-wavelength grating for enhanced ring resonator biosensor.

While silicon photonic resonant cavities have been widely investigated for biosensing applications, enhancing their sensitivity and detection limit continues to be an area of active research. Here, we describe how to engineer the effective refractive index and mode profile of a silicon-on-insulator (SOI) waveguide using sub-wavelength gratings (SWG) and report on its observed performance as a biosensor. We designed a 30 µm diameter SWG ring resonator and fabricated it using Ebeam lithography. Its characterization resulted in a quality factor, Q, of 7 · 103, bulk sensitivity Sb = 490 nm/RIU, and system limit of detection sLoD = 2 · 10-6 RIU. Finally we employ a model biological sandwich assay to demonstrate its utility for biosensing applications.

Design and fabrication of SOI micro-ring resonators based on sub-wavelength grating waveguides.

Standard silicon photonic strip waveguides offer a high intrinsic refractive index contrast; this permits strong light confinement, leading to compact bends, which in turn facilitates the fabrication of devices with small footprints. Sub-wavelength grating (SWG) based waveguides can allow the fabrication of low loss devices with specific, engineered optical properties. The combination of SWG waveguides with optical micro-resonators can offer the possibility of achieving resonators with properties different from the traditional SOI rings. One important property that SWG rings can offer is decreased light confinement in the waveguide core; this improves the resonator's sensitivity to changes in the cladding refractive index, making the rings ideal for refractive index sensing applications. In this paper, we present the design and experimental characterization of SWG based rings realized on SOI chips without upper cladding (permitting their use as sensors). The fabricated rings offer quality factors in the range of ~1k-6k, depending on SWG parameters. Based on the comparison of experimental and simulated data we expect sensitivities exceeding 383 nm/RIU in water and 270 nm/RIU in air, showing excellent potential for use in sensing applications.

Spiral Bragg grating waveguides for TM mode silicon photonics.

We demonstrate spiral Bragg grating waveguides (BGWs) on the silicon-on-insulator (SOI) platform for the fundamental transverse magnetic (TM) mode. We also compare TM spiral waveguides to equivalent transverse electric (TE) spiral waveguides and show that the TM spiral waveguides have lower propagation losses. Our spiral waveguides are space-efficient, requiring only areas of 131×131 µm(2) to accommodate 4 mm long BGWs, and, thus, are less susceptible to fabrication non-uniformities. Due to the lengths and reduced susceptibility to fabrication non-uniformities, we were able to obtain narrow bandwidth, large extinction ratio (ER) devices, as narrow as 0.09 nm and as large as 52 dB, respectively. Finally, we demonstrate a 4 mm long TM chirped spiral Bragg grating waveguide with a negative, average, group delay slope of -11 ps/nm.

Sub-wavelength grating components for integrated optics applications on SOI chips.

In this paper we demonstrate silicon on insulator (SOI) sub-wavelength grating (SWG) optical components for integrated optics and sensing. Light propagation in SWG devices is studied and realized with no cladding on top of the waveguide. In particular, we focused on SWG bends, tapers and directional couplers, all realized with compatible geometries in order to be used as building blocks for more complex integrated optics devices (interferometers, switches, resonators, etc.). Fabricated SWG tapers for TE and TM polarizations are described; they allow for connecting SWG devices to regular strip waveguides with loss lower than 1 dB per taper. Our SWG directional coupler presents a very compact design and a negligible wavelength dependence of its crossover length (and as a consequence of its coupling coefficient, κ), over a 40 nm bandwidth. This wavelength flatten response represents a bandwidth enhancement with respect to standard directional couplers (made using strip or rib waveguides), in particular for the TE mode. SWG bends are demonstrated, their loss dependence on radius is analyzed, and fabricated bends have a loss in the range 0.8-1.6 dB per 90 degrees bend. Simulated and measured results show promise for large-scale fabrication of complex optical devices and high sensitivity sensors based on SWG waveguides with engineered optical properties, tailored to specific applications.

Focusing sub-wavelength grating couplers with low back reflections for rapid prototyping of silicon photonic circuits.

We demonstrate fully-etched fiber-waveguide grating couplers with sub-wavelength gratings showing high coupling efficiency as well as low back reflections for both transverse electric (TE) and transverse magnetic (TM) modes. The power reflection coefficients for the TE and TM modes have been significantly suppressed to -16.2 dB and -20.8 dB, respectively. Focusing grating lines have also been used to reduce the footprint of the design. Our sub-wavelength grating couplers for the TE and TM modes show respective measured insertion losses of 4.1 dB and 3.7 dB with 1-dB bandwidths of 30.6 nm (3-dB bandwidth of 52.3 nm) and 47.5 nm (3-dB bandwidth of 81.5 nm), respectively.

Silicon-on-insulator sensors using integrated resonance-enhanced defect-mediated photodetectors.

A resonance-enhanced, defect-mediated, ring resonator photodetector has been implemented as a single unit biosensor on a silicon-on-insulator platform, providing a cost effective means of integrating ring resonator sensors with photodetectors for lab-on-chip applications. This method overcomes the challenge of integrating hybrid photodetectors on the chip. The demonstrated responsivity of the photodetector-sensor was 90 mA/W. Devices were characterized using refractive index modified solutions and showed sensitivities of 30 nm/RIU.

Performance of ultra-thin SOI-based resonators for sensing applications.

This work presents simulation and experimental results of ultra-thin optical ring resonators, having larger Evanescent Field (EF) penetration depths, and therefore larger sensitivities, as compared to conventional Silicon-on-Insulator (SOI)-based resonator sensors. Having higher sensitivities to the changes in the refractive indices of the cladding media is desirable for sensing applications, as the interactions of interest take place in this region. Using ultra-thin waveguides (<100 nm thick) shows promise to enhance sensitivity for both bulk and surface sensing, due to increased penetration of the EF into the cladding. In this work, the designs and characterization of ultra-thin resonator sensors, within the constraints of a multi-project wafer service that offers three waveguide thicknesses (90 nm, 150 nm, and 220 nm), are presented. These services typically allow efficient integration of biosensors with on-chip detectors, moving towards the implementation of lab-on-chip (LoC) systems. Also, higher temperature stability of ultra-thin resonator sensors were characterized and, in the presence of intentional environmental (temperature) fluctuations, were compared to standard transverse electric SOI-based resonator sensors.

Precise control of the coupling coefficient through destructive interference in silicon waveguide Bragg gratings.

We present waveguide Bragg gratings with misaligned sidewall corrugations on a silicon-on-insulator platform. The grating strength can be tuned by varying the misalignment between the corrugations on the two sidewalls. This approach allows for a wide range of grating coupling coefficients to be achieved with precise control, and substantially reduces the effects of quantization error due to the finite mask grid size. The experimental results are in very good agreement with simulations using the finite-difference time-domain (FDTD) method.

Silicon photonic slot waveguide Bragg gratings and resonators.

We present the design, fabrication, and characterization of integrated Bragg gratings in silicon-on-insulator slot waveguides. The Bragg gratings are formed with sidewall corrugations, either on the inside or on the outside of the waveguide. We demonstrate resonators implemented using phase-shifted Bragg gratings in slot waveguides, showing quality factors up to 3 × 10(4). Due to the strong optical confinement in the slot, these devices are promising for optical sensing applications. The devices were fabricated using a CMOS-compatible process, facilitating high-volume and low-cost production.

Experimental performance of DWDM quadruple Vernier racetrack resonators.

We demonstrate that one can meet numerous commercial requirements for filters used in dense wavelength-division multiplexing applications using quadruple Vernier racetrack resonators in the silicon-on-insulator platform. Experimental performance shows a ripple of 0.2 dB, an interstitial peak suppression of 39.7 dB, an adjacent channel isolation of 37.2 dB, an express channel isolation of 10.2 dB, and a free spectral range of 37.52 nm.

Ultra-compact, flat-top demultiplexer using anti-reflection contra-directional couplers for CWDM networks on silicon.

Wavelength-division-multiplexing (WDM) networks with wide channel grids and bandwidths are promising for low-cost, low-power optical interconnects. Wide-bandwidth, single-band (i.e., no free-spectral range) add-drop filters have been developed on silicon using anti-reflection contra-directional couplers with out-of-phase Bragg gratings. Using such filter components, we demonstrate a 4-channel, coarse-WDM demultiplexer with flat passbands of up to 13 nm and an ultra-compact size of 1.2 × 10(-3) mm(2).

Silicon photonic micro-disk resonators for label-free biosensing.

Silicon photonic biosensors are highly attractive for multiplexed Lab-on-Chip systems. Here, we characterize the sensing performance of 3 µm TE-mode and 10 µm dual TE/TM-mode silicon photonic micro-disk resonators and demonstrate their ability to detect the specific capture of biomolecules. Our experimental results show sensitivities of 26 nm/RIU and 142 nm/RIU, and quality factors of 3.3x10(4) and 1.6x10(4) for the TE and TM modes, respectively. Additionally, we show that the large disks contain both TE and TM modes with differing sensing characteristics. Finally, by serializing multiple disks on a single waveguide bus in a CMOS compatible process, we demonstrate a biosensor capable of multiplexed interrogation of biological samples.

Coupler-apodized Bragg-grating add-drop filter.

We demonstrate an apodization technique using tapered coupler gaps in grating-assisted asymmetric couplers, which circumvents the need for tapered waveguide perturbations and enables a higher tolerance to fabrication errors. A high sidelobe suppression ratio of 30 dB has been obtained on the submicrometer silicon-on-insulator platform using a CMOS-compatible photonics process with 193 nm lithography.

High performance Vernier racetrack resonators.

We demonstrate record performance of series-coupled silicon racetrack resonators exhibiting the Vernier effect. Our device has an interstitial peak suppression (IPS) of 25.5 dB, which is 14.5 dB larger than previously reported results. We also demonstrate the relationship between the inter-ring gap distance and the IPS as well as the 3 dB bandwidth (BW) both theoretically and experimentally. Namely, we show that as the inter-ring gap distance increases, the IPS increases and the 3 dB BW decreases.

Microfabricated formaldehyde gas sensors.

Formaldehyde is a volatile organic compound that is widely used in textiles, paper, wood composites, and household materials. Formaldehyde will continuously outgas from manufactured wood products such as furniture, with adverse health effects resulting from prolonged low-level exposure. New, microfabricated sensors for formaldehyde have been developed to meet the need for portable, low-power gas detection. This paper reviews recent work including silicon microhotplates for metal oxide-based detection, enzyme-based electrochemical sensors, and nanowire-based sensors. This paper also investigates the promise of polymer-based sensors for low-temperature, low-power operation.

A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide.

We present a novel silicon photonic biosensor using phase-shifted Bragg gratings in a slot waveguide. The optical field is concentrated inside the slot region, leading to efficient light-matter interaction. The Bragg gratings are formed with sidewall corrugations on the outside of the waveguide, and a phase shift is introduced to create a sharp resonant peak within the stop band. We experimentally demonstrate a high sensitivity of 340 nm/RIU measured in salt solutions and a high quality factor of 1.5 × 104, enabling a low intrinsic limit of detection of 3 × 10⁻4 RIU. Furthermore, the silicon device was fabricated by a CMOS foundry, facilitating high-volume and low-cost production. Finally, we demonstrate the device's ability to interrogate specific biomolecular interactions, resulting in the first of its kind label-free biosensor.