RESUMEN
We present a temporally-stable active mount to compensate for manufacturing-induced deformations of reflective optical components. In this paper, we introduce the design of the active mount, and its evaluation results for two sample mirrors: a quarter mirror of 115 × 105 × 9 mm3, and a full mirror of 228 × 210 × 9 mm3. The quarter mirror with 20 actuators shows a best wavefront error rms of 10 nm. Its installation position depending deformations are addressed by long-time measurements over 14 weeks indicating no significance of the orientation. Size-induced differences of the mount are studied by a full mirror with 80 manual actuators arranged in the same actuator pattern as the quarter mirror. This sample shows a wavefront error rms of (27±2) nm over a measurement period of 46 days. We conclude that the developed mount is suitable to compensate for manufacturing-induced deformations of large reflective optics, and likely to be included in the overall systems alignment procedure.
RESUMEN
A method is presented to mount large aperture unimorph deformable mirrors by compliant cylinders (CC). The CCs are manufactured from a soft silicone, and shear testing is performed in order to evaluate the Young's modulus. A scale mirror model is assembled to evaluate mount-induced change of piezoelectric deformation, and its applicability for tightly focusing mirrors. Experiments do not show any decrease of piezoelectric stroke. Further it is shown that the changes of surface fidelity by the attachment of the deformable mirror to its mount are neglectable.