CMOS-compatible 6-inch wafer integration of photonic waveguides and uniformity analysis.

In this work, we demonstrate photonic fabrication by integrating waveguide resonators and groove structures using cost-effective i-line stepper lithography on a 6-inch full wafer. Low-loss silicon nitride (SiN) waveguide can be realized with the quality (Q) factor of waveguide resonators up to 105. In addition, groove structures are also integrated by the full-wafer process, providing long-term stability of coupling and package solutions. The uniformity of different die locations is verified within the full wafer, showing the good quality of the fabricated photonic devices. This process integration of photonic devices provides the potential for mass-productive, high-yield, and high-uniformity manufacturing.

Linearization of wavelength sweeping lasers for the construction of 4-D FMCW LiDAR images of slow-moving objects using baseband beat note signals.

A FMCW LiDAR system of both the distributed feedback laser and external cavity laser is established in baseband beat notes, rather than up-conversion to an intermediate frequency to exclude flicker noise. Meanwhile, utilizing fast-scanning MEMS mirrors, high-quality real-time (1 fps) 4-D images of the slow-moving object (10 mm/s) can be directly constructed at the baseband with a central frequency as low as 100 kHz and a small Doppler shift. The proposed LiDAR architecture based on such a low-frequency baseband significantly improves the optical power budget on the transmitter side and eliminates the costly high-speed sampling circuits on the receiver side.

Fabrication of tapered waveguides by i-line UV lithography for flexible coupling control.

A tapered bus-waveguide is demonstrated to enhance the waveguide-to-cavity coupling by mass-productive, cost-effective i-line UV lithography. Through enlarging the overlap between the evanescent wave and waveguide resonator, we experimentally show that the coupling strength of silicon nitride waveguides can be 7 times stronger than the conventional coupling of a uniform, straight bus-waveguide. For the first time, strong over-coupling is identified at a 400 nm gap and quality factor ≈ 105 without elongating the coupling length. This design relieves the fabrication limits and provides the flexibility for coupling control, especially in the strongly over-coupled regime with i-line UV lithography.

Stability analysis of mode-coupling-assisted microcombs in normal dispersion.

We theoretically study the stability of mode-coupling-assisted frequency comb generation in normal-dispersion microresonators. With the aid of mode coupling, quantitative analysis of the modulational instability is explored in the parameter space of pump power and detuning. By exploring the coupled mode number, dispersion, and coupling strength in the normalized Lugiato-Lefever model, the modulational stability gain exists and yields extended spatial structures within the regime of eigenvalue bifurcations. Moreover, the dynamics and efficiency of microcombs are discussed, providing the accessibility of high-efficient, stable, and controllable combs. This work offers universal guidelines for operating mode-coupling-assisted combs in a normal-dispersion system.

Long-haul coherent communications using microresonator-based frequency combs.

Microresonator-based frequency combs are strong contenders as light sources for wavelength-division multiplexing (WDM). Recent experiments have shown the potential of microresonator combs for replacing a multitude of WDM lasers with a single laser-pumped device. Previous demonstrations have however focused on short-distance few-span links reaching an impressive throughput at the expense of transmission distance. Here we report the first long-haul coherent communication demonstration using a microresonator-based comb source. We modulated polarization multiplexed (PM) quadrature phase-shift keying-data onto the comb lines allowing transmission over more than 6300 km in a single-mode fiber. In a second experiment, we reached beyond 700 km with the PM 16 quadrature amplitude modulation format. To the best of our knowledge, these results represent the longest fiber transmission ever achieved using an integrated comb source.

Intracavity characterization of micro-comb generation in the single-soliton regime.

Soliton formation in on-chip micro-comb generation balances cavity dispersion and nonlinearity and allows coherent, low-noise comb operation. We study the intracavity waveform of an on-chip microcavity soliton in a silicon nitride microresonator configured with a drop port. Whereas combs measured at the through port are accompanied by a very strong pump line which accounts for >99% of the output power, our experiments reveal that inside the microcavity, most of the power is in the soliton. Time-domain measurements performed at the drop port provide information that directly reflects the intracavity field. Data confirm a train of bright, close to bandwidth-limited pulses, accompanied by a weak continuous wave (CW) background with a small phase shift relative to the comb.

Thermal tuning of Kerr frequency combs in silicon nitride microring resonators.

Microresonator based Kerr frequency comb generation has many attractive features, including ultrabroad spectra, chip-level integration, and low power consumption. Achieving precise tuning control over the comb frequencies will be important for a number of practical applications, but has been little explored for microresonator combs. In this paper, we characterize the thermal tuning of a coherent Kerr frequency comb generated from an on-chip silicon nitride microring. When the microring temperature is changed by ~70 °C with an integrated microheater, the line spacing and center frequency of the comb are tuned respectively by -253 MHz (-3.57 MHz/°C) and by -175 GHz (-2.63 GHz/°C); the latter constitutes 75% of the comb line spacing. From these results we obtain a shift of 25 GHz (362.07 MHz/°C) in the comb carrier-envelope offset frequency. Numerical simulations are performed by taking into account the thermo-optic effects in the waveguide core and cladding. The temperature variation of the comb line spacing predicted from simulations is close to that observed in experiments. The time-dependent thermal response of the microheater based tuning scheme is characterized; time constants of 30.9 µs and 0.71 ms are observed.

Deterministic single soliton generation and compression in microring resonators avoiding the chaotic region.

A path within the parameter space of detuning and pump power is demonstrated in order to obtain a single cavity soliton (CS) with certainty in SiN microring resonators in the anomalous dispersion regime. Once the single CS state is reached, it is possible to continue a path to compress it, broadening the corresponding single free spectral range (FSR) Kerr frequency comb. The first step to achieve this goal is to identify the stable regions in the parameter space via numerical simulations of the Lugiato-Lefever equation (LLE). Later, using this identification, we define a path from the stable modulation instability (SMI) region to the stable cavity solitons (SCS) region avoiding the chaotic and unstable regions.

One-way transmission of 10 Gbps data through a silicon optical diode based on nonreciprocal resonance reshaping.

The reduced optical bandwidth associated with resonance enhancement poses a significant challenge for resonators to process wide-bandwidth optical data. We report one-way transmission of 10 giga-bit-per-second optical data through a silicon optical diode based on both the resonance-enhanced optical nonlinear effects and resonance reshaping. The diode is operated with a forward-only or backward-only input. In the backward direction, the diode corrupts the data through the strong dispersion and attenuation associated with the resonance of a microring. In the forward direction, the data pass through the diode with negligible distortions because the resonance is red-shifted from the carrier wavelength. In this experimental context the finite bandwidth associated with the optical resonance may be considered beneficial, since the phase response makes an additional contribution to transmission nonreciprocity beyond what is seen with unmodulated light.

Refining silicon nitride waveguide quality through femtosecond laser annealing.

We present a method for modification of silicon nitride (Si3N4) waveguide resonators using femtosecond laser annealing. The quality (Q) factor of the waveguide resonators can be improved by approximately 1.3 times after annealing. Notably, waveguides that originally had a high Q value maintained their quality after the annealing process. However, those with a lower initial Q value experienced a noticeable improvement post-annealing. To characterize the annealing effect, the surface morphologies of Si3N4 films, both pre- and post-annealing, were analyzed using atomic force microscopy. The findings suggest a potential enhancement in surface refinement. Furthermore, Raman spectroscopy confirmed that the Si3N4 film's composition remains largely consistent with its original state within the annealing power range of 0.6-1.6 W. This research underscores the potential of femtosecond laser annealing as an efficient, cost-effective, and localized technique for fabricating low-loss integrated photonics.

Drop-port study of microresonator frequency combs: power transfer, spectra and time-domain characterization.

We use a drop-port geometry to characterize frequency combs generated from silicon nitride on-chip microresonators in the normal group velocity regime. In sharp contrast with the traditional transmission geometry, we observe smooth output spectra with comparable powers in the pump and adjacent comb lines. The power transfer into the comb may be explained to a large extent by the coupling parameters characterizing the linear operation of the resonances studied. Furthermore, comparison of thru- and drop-port spectra shows that much of the ASE noise is filtered out by transmission to the drop-port. Autocorrelation measurements are performed on the drop-port output, without the need to filter out or suppress the strong pump line as is necessary in thru-port experiments. Passively mode-locked pulses with low background are observed in a normal dispersion microcavity.

Flexible dispersion engineering using polymer patterning in nanophotonic waveguides.

We demonstrate the engineering of waveguide dispersion by lithographically patterning the polymer cladding on silicon nitride waveguide resonators. Both normal and anomalous dispersion, ranging from - 462 to 409 ps/nm/km, can be achieved for the same waveguide dimension within an integrated photonic chip. In the meantime, this simple process shows no impact on the waveguide loss and the quality factor of the waveguide resonators, offering flexibility in tailoring designable dispersion for a universal photonic platform. In addition, by adjusting the coverage ratio of cladding, relatively low dispersion (≈ - 130 ps/nm/km) is also demonstrated in the same waveguide resonator, yielding the potentials for zero-dispersive waveguide resonators by a proper coverage ratio of the polymer cladding.

Observation of correlation between route to formation, coherence, noise, and communication performance of Kerr combs.

Microresonator optical frequency combs based on cascaded four-wave mixing are potentially attractive as a multi-wavelength source for on-chip optical communications. In this paper we compare time domain coherence, radio-frequency (RF) intensity noise, and individual line optical communications performance for combs generated from two different silicon nitride microresonators. The comb generated by one microresonator forms directly with lines spaced by a single free spectral range (FSR) and exhibits high coherence, low noise, and excellent 10 Gbit/s optical communications results. The comb generated by the second microresonator forms initially with multiple FSR line spacing, with additional lines later filling to reach single FSR spacing. This comb exhibits degraded coherence, increased intensity noise, and severely degraded communications performance. This study is to our knowledge the first to simultaneously investigate and observe a correlation between the route to comb formation, the coherence, noise, and optical communications performance of a Kerr comb.

Probing coherence in microcavity frequency combs via optical pulse shaping.

Recent investigations of microcavity frequency combs based on cascaded four-wave mixing have revealed a link between the evolution of the optical spectrum and the observed temporal coherence. Here we study a silicon nitride microresonator for which the initial four-wave mixing sidebands are spaced by multiple free spectral ranges (FSRs) from the pump. Additional lines then fill in to yield a comb with single FSR spacing, resulting in partial coherence. By using a pulse shaper to select and manipulate the phase of various subsets of spectral lines, we are able to probe the structure of the coherence within the partially coherent comb. Our data demonstrate strong variation in the degree of mutual coherence between different groups of lines and provide support for a simple model of partially coherent comb formation.

Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding.

In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 polymer as the outer cladding layer, the waveguide dispersion can be tuned from -143 to -257 ps/nm/km. Through the simple, conventional polymer stripping process, we reconstruct the waveguide dispersion back to that of the original air-cladded device without significantly impacting the quality factor of resonators. This work provides the potential to design the waveguide dispersion in normal and anomalous regimes within an integrated photonic circuit.

Study of microcomb threshold power with coupling scaling.

We model the generation threshold and conversion efficiency of microcombs by scaling the cavity coupling. With the Lugiato-Lefever equation (LLE), quantitative analysis of threshold is established in the parameter space of pump power and coupling. Considering the large detuning and Kerr-induced phase shift, the threshold power is numerically solved with the minimum at over-coupling, in agreement with that from the traveling wave theory. Furthermore, the coupling dependence on microcomb generation is discussed, providing the accessibility of high-efficient, stable combs (≥ 40%) around the threshold. This work offers universal guidelines for the design of microcombs with low-power and high-efficient operation.

High-order coherent communications using mode-locked dark-pulse Kerr combs from microresonators.

Microresonator frequency combs harness the nonlinear Kerr effect in an integrated optical cavity to generate a multitude of phase-locked frequency lines. The line spacing can reach values in the order of 100 GHz, making it an attractive multi-wavelength light source for applications in fiber-optic communications. Depending on the dispersion of the microresonator, different physical dynamics have been observed. A recently discovered comb state corresponds to the formation of mode-locked dark pulses in a normal-dispersion microcavity. Such dark-pulse combs are particularly compelling for advanced coherent communications since they display unusually high power-conversion efficiency. Here, we report the first coherent-transmission experiments using 64-quadrature amplitude modulation encoded onto the frequency lines of a dark-pulse comb. The high conversion efficiency of the comb enables transmitted optical signal-to-noise ratios above 33 dB, while maintaining a laser pump power level compatible with state-of-the-art hybrid silicon lasers.

Second-harmonic-assisted four-wave mixing in chip-based microresonator frequency comb generation.

Simultaneous Kerr comb formation and second-harmonic generation with on-chip microresonators can greatly facilitate comb self-referencing for optical clocks and frequency metrology. Moreover, the presence of both second- and third-order nonlinearities results in complex cavity dynamics that is of high scientific interest but is still far from being well-understood. Here, we demonstrate that the interaction between the fundamental and the second-harmonic waves can provide an entirely new way of phase matching for four-wave mixing in optical microresonators, enabling the generation of optical frequency combs in the normal dispersion regime under conditions where comb creation is ordinarily prohibited. We derive new coupled time-domain mean-field equations and obtain simulation results showing good qualitative agreement with our experimental observations. Our findings provide a novel way of overcoming the dispersion limit for simultaneous Kerr comb formation and second-harmonic generation, which might prove to be especially important in the near-visible to visible range where several atomic transitions commonly used for the stabilization of optical clocks are located and where the large normal material dispersion is likely to dominate.

Determination of chronological aging parameters in epidermal keratinocytes by in vivo harmonic generation microscopy.

Skin aging is an important issue in geriatric and cosmetic dermatology. To quantitatively analyze changes in keratinocytes related to intrinsic aging, we exploited a 1230 nm-based in vivo harmonic generation microscopy, combining second- and third-harmonic generation modalities. 52 individuals (21 men and 31 women, age range 19-79) were examined on the sun-protected volar forearm. Through quantitative analysis by the standard algorithm provided, we found that the cellular and nuclear size of basal keratinocytes, but not that of granular cells, was significantly increased with advancing age. The cellular and nuclear areas, which have an increase of 0.51 µm(2) and 0.15 µm(2) per year, respectively, can serve as scoring indices for intrinsic skin aging.