Fabrication and scanning-angle temperature dependence of metal-based, optical resonant scanners with PZT actuation.

Metal-based, optical scanning devices with a large mirror size of 1 mm(2) and a wide scanning angle of over 90 degrees were fabricated. A high optical scanning angle (90 degrees ) was achieved at a resonance frequency of 7.33 kHz and a driving voltage of 80 V (peak-to-peak) in ambient air without vacuum packaging. We compared the performance of metal-based, optical scanners driven by PZT bulk ceramic and aerosol-deposited PZT thick films over the temperature range from -20 degrees C to 80 degrees C in an environmental chamber.

Dielectric characteristics of barium strontium titanate films prepared by aerosol deposition on a Cu substrate.

Polycrystalline barium strontium titanate (Ba(x)Sr(1-x)TiO(3), BST) films were directly prepared on copper substrates using an aerosol deposition method (ADM) at room temperature. Electric properties, such as the dielectric constant and tunability, were investigated as a function of the Ba content in Ba(x)Sr(1-x)TiO(3) (x = 1.0, 0.6, 0.4) films. At a frequency of 100 kHz, the dielectric constant of the as-deposited BST films were 100, 201, and 72 for x = 1.0, 0.6, and 0.4, respectively. After annealing in N(2) ambient at 500 degrees C, the dielectric constant of the films on Cu electrodes were 190, 400, and 170 at x = 1.0, 0.6, and 0.4, respectively. Moreover, the BST (x = 0.6) film showed a high tunability of 30% under an applied electric field of 300 kV cm(-1).