Two-Photon Microscopy with a Double-Wavelength Metasurface Objective Lens.

Two-photon microscopy is a key imaging technique in life sciences due to its superior deep-tissue imaging capabilities. Light-weight and compact two-photon microscopes are of great interest because of their applications for in vivo deep brain imaging. Recently, dielectric metasurfaces have enabled a new category of small and lightweight optical elements, including objective lenses. Here we experimentally demonstrate two-photon microscopy using a double-wavelength metasurface lens. It is specifically designed to focus 820 and 605 nm light, corresponding to the excitation and emission wavelengths of the measured fluorophors, to the same focal distance. The captured two-photon images are qualitatively comparable to the ones taken by a conventional objective lens. Our metasurface lens can enable ultracompact two-photon microscopes with similar performance compared to current systems that are usually based on graded-index-lenses. In addition, further development of tunable metasurface lenses will enable fast axial scanning for volumetric imaging.

Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies.

We report transmissive color filters based on subwavelength dielectric gratings that can replace conventional dye-based color filters used in backside-illuminated CMOS image sensor (BSI CIS) technologies. The filters are patterned in an 80 nm-thick poly silicon film on a 115 nm-thick SiO2 spacer layer. They are optimized for operating at the primary RGB colors, exhibit peak transmittance of 60-80%, and have an almost insensitive response over a ± 20° angular range. This technology enables shrinking of the pixel sizes down to near a micrometer.

Coupling erbium dopants in yttrium orthosilicate to silicon photonic resonators and waveguides.

A scalable platform for on-chip optical quantum networks will rely on standard top-down nanofabrication techniques and solid-state emitters with long coherence times. We present a new hybrid platform that integrates amorphous silicon photonic waveguides and microresonators fabricated on top of a yttrium orthosilicate substrate doped with erbium ions. The quality factor of one such resonator was measured to exceed 100,000 and the ensemble cooperativity was measured to be 0.54. The resonator-coupled ions exhibited spontaneous emission rate enhancement and increased coupling to the input field, as required for further development of on-chip quantum light-matter interfaces.

Orbital angular momentum beams generated by passive dielectric phase masks and their performance in a communication link.

We demonstrate the generation of orbital angular momentum (OAM) beams using high-efficient polarization-insensitive phase masks. The OAM beams generated by the phase masks are characterized in terms of their tolerance to misalignment (lateral displacement or tilt) between the incident beam and phase mask. For certain scenarios, our results show that (a) when the tilt angle is within the range of -20 to +20 deg, the crosstalk among modes is less than -15 dB; and (b) lateral displacement of 0.3 mm could cause a large amount of power leaked to adjacent modes. Finally, OAM beams generated by the phase masks are demonstrated over a two-channel OAM-multiplexing link, each channel carrying a 40 Gbit/s data stream. An optical signal-to-noise-ratio (OSNR) penalty of ∼1 dB is measured without crosstalk at the bit error rate (BER) of 3.8×10-3. With crosstalk, an OSNR penalty of <1.5 dB is observed at the same BER.

Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures.

We propose and experimentally demonstrate a planar array of optical bandpass filters composed of low loss dielectric metasurface layers sandwiched between two distributed Bragg reflectors (DBRs). The two DBRs form a Fabry-Pérot resonator whose center wavelength is controlled by the design of the transmissive metasurface layer which functions as a phase shifting element. We demonstrate an array of bandpass filters with spatially varying center wavelengths covering a wide range of operation wavelengths of 250nm around λ = 1550nm (Δλ/λ = 16%). The center wavelengths of each filter are independently controlled only by changing the in-plane geometry of the sandwiched metasurfaces, and the experimentally measured quality factors are larger than 700. The demonstrated filter array can be directly integrated on top of photodetector arrays to realize on-chip high-resolution spectrometers with free-space coupling.

High efficiency double-wavelength dielectric metasurface lenses with dichroic birefringent meta-atoms.

Metasurfaces are ultrathin optical structures that manipulate optical wavefronts. Most metasurface devices which deflect light are designed for operation at a single wavelength, and their function changes as the wavelength is varied. Here we propose and demonstrate a double-wavelength metasurface based on polarization dependent dielectric meta-atoms that control the phases of two orthogonal polarizations independently. Using this platform, we design lenses that focus light at 915 and 780 nm with perpendicular linear polarizations to the same focal distance. Lenses with numerical apertures up to 0.7 and efficiencies from 65% to above 90% are demonstrated. In addition to the high efficiency and numerical aperture, an important feature of this technique is that the two operation wavelengths can be chosen to be arbitrarily close. These characteristics make these lenses especially attractive for fluorescence microscopy applications.

High resolution on-chip optical filter array based on double subwavelength grating reflectors.

An optical filter array consisting of vertical narrow-band Fabry-Pérot (FP) resonators formed by two highly reflective high contrast subwavelength grating mirrors is reported. The filters are designed to cover a wide range of operation wavelengths (Δλ/λ = 5%) just by changing the in-plane grating parameters while the device thickness is maintained constant. Operation in the telecom band with transmission efficiencies greater than 40% and quality factors greater than 1,000 are measured experimentally for filters fabricated on the same substrate.

Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers.

Light emitted from single-mode semiconductor lasers generally has large divergence angles, and high numerical aperture lenses are required for beam collimation. Visible and near infrared lasers are collimated using aspheric glass or plastic lenses, yet collimation of mid-infrared quantum cascade lasers typically requires more costly aspheric lenses made of germanium, chalcogenide compounds, or other infrared-transparent materials. Here we report mid-infrared dielectric metasurface flat lenses that efficiently collimate the output beam of single-mode quantum cascade lasers. The metasurface lenses are composed of amorphous silicon posts on a flat sapphire substrate and can be fabricated at low cost using a single step conventional UV binary lithography. Mid-infrared radiation from a 4.8 µm distributed-feedback quantum cascade laser is collimated using a polarization insensitive metasurface lens with 0.86 numerical aperture and 79% transmission efficiency. The collimated beam has a half divergence angle of 0.36° and beam quality factor of M2=1.02.

Grating integrated single mode microring laser.

Microring and microdisk lasers are potential candidates for small footprint, low threshold in-plane integrated lasers; however, they exhibit multimode lasing spectra and bistability. Here, we theoretically propose and experimentally demonstrate a novel approach for achieving single mode lasing in microring lasers. Our approach is based on increasing the radiation loss of all but one of the resonant modes of microring resonators by integrating second order gratings on the microrings' waveguide. We present single mode operation of electrically pumped semiconductor microring lasers whose lasing modes are lithographically selected via the second order grating. We also show that adding the grating does not increase the lasing threshold current significantly.

Measuring the Nonuniform Evaporation Dynamics of Sprayed Sessile Microdroplets with Quantitative Phase Imaging.

We demonstrate real-time quantitative phase imaging as a new optical approach for measuring the evaporation dynamics of sessile microdroplets. Quantitative phase images of various droplets were captured during evaporation. The images enabled us to generate time-resolved three-dimensional topographic profiles of droplet shape with nanometer accuracy and, without any assumptions about droplet geometry, to directly measure important physical parameters that characterize surface wetting processes. Specifically, the time-dependent variation of the droplet height, volume, contact radius, contact angle distribution along the droplet's perimeter, and mass flux density for two different surface preparations are reported. The studies clearly demonstrate three phases of evaporation reported previously: pinned, depinned, and drying modes; the studies also reveal instances of partial pinning. Finally, the apparatus is employed to investigate the cooperative evaporation of the sprayed droplets. We observe and explain the neighbor-induced reduction in evaporation rate, that is, as compared to predictions for isolated droplets. In the future, the new experimental methods should stimulate the exploration of colloidal particle dynamics on the gas-liquid-solid interface.

Fast and accurate finite element analysis of large-scale three-dimensional photonic devices with a robust domain decomposition method.

A fast and accurate full-wave technique based on the dual-primal finite element tearing and interconnecting method and the second-order transmission condition is presented for large-scale three-dimensional photonic device simulations. The technique decomposes a general three-dimensional electromagnetic problem into smaller subdomain problems so that parallel computing can be performed on distributed-memory computer clusters to reduce the simulation time significantly. With the electric fields computed everywhere, photonic device parameters such as transmission and reflection coefficients are extracted. Several photonic devices, with simulation volumes up to 1.9×10(4) (λ/n(avg))3 and modeled with over one hundred million unknowns, are simulated to demonstrate the application, efficiency, and capability of this technique. The simulations show good agreement with experimental results and in a special case with a simplified two-dimensional simulation.

Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy.

Due to the diffraction limited resolution and the presence of speckle noise, visible laser light is generally thought to be impractical for finding deep subwavelength defects in patterned semiconductor wafers. Here, we report on a nondestructive low-noise interferometric imaging method capable of detecting nanoscale defects within a wide field of view using visible light. The method uses a common-path laser interferometer and a combination of digital image processing techniques to produce 70 µm by 27 µm panoramic phase and amplitude images of the test nanopattern. Significant noise reduction and high sensitivity are achieved, which enables successful detection of several different types of sparse defects with sizes on the order of 20 nm wide by 100 nm long by 110 nm tall.

3D alignment of distant patterns with deep-subwavelength precision using metasurfaces.

Measurement of the relative positions of two objects in three dimensions with sub-nanometer precision is essential to fundamental physics experiments and applications such as aligning multi-layer patterns of semiconductor chips. Existing methods, which rely on microscopic imaging and registration of distant patterns, lack the required accuracy and precision for the next generation of three-dimensional (3D) chips. Here we show that 3D misalignment between two distant objects can be measured using metasurface alignment marks, a laser, and a camera with sub-nanometer precision. Through simulations, we demonstrate that the shot noise-limited precisions of the lateral and axial misalignments between the marks are λ0/50, 000 and λ0/6, 300 (λ0: laser's wavelength), respectively. With its high precision and simplicity, the technique enables the next generation of 3D-integrated optical and electronic chips and paves the way for developing cost-effective and compact sensors relying on sub-nanometer displacement measurements.

Roadmap for Optical Metasurfaces.

Metasurfaces have recently risen to prominence in optical research, providing unique functionalities that can be used for imaging, beam forming, holography, polarimetry, and many more, while keeping device dimensions small. Despite the fact that a vast range of basic metasurface designs has already been thoroughly studied in the literature, the number of metasurface-related papers is still growing at a rapid pace, as metasurface research is now spreading to adjacent fields, including computational imaging, augmented and virtual reality, automotive, display, biosensing, nonlinear, quantum and topological optics, optical computing, and more. At the same time, the ability of metasurfaces to perform optical functions in much more compact optical systems has triggered strong and constantly growing interest from various industries that greatly benefit from the availability of miniaturized, highly functional, and efficient optical components that can be integrated in optoelectronic systems at low cost. This creates a truly unique opportunity for the field of metasurfaces to make both a scientific and an industrial impact. The goal of this Roadmap is to mark this "golden age" of metasurface research and define future directions to encourage scientists and engineers to drive research and development in the field of metasurfaces toward both scientific excellence and broad industrial adoption.

Measurements of the refractive indices and thermo-optic coefficients of Si3N4 and SiO(x) using microring resonances.

We present a method for determining the core and cladding refractive indices of a microring resonator from its measured quasi-transverse electric and magnetic resonant modes. We use single wavelength reflective microrings to resolve the azimuthal order ambiguity of the measured resonances. We perform accurate electromagnetic simulations to model the dependence of the resonances on geometrical and material parameters. We linearize the model and use the singular value decomposition method to find the best fit parameters for the measured data. At 1550 nm, we determine n(Si(3)N(4))=1.977±0.003 for stoichiometric silicon nitride deposited using low-pressure chemical vapor deposition (LPCVD) technique and n(SiO(x))=1.428±0.011 for plasma-enhanced chemical vapor deposition (PECVD) oxide. By measuring the temperature sensitivities of microring resonant modes with different polarizations, we find the thermo-optic coefficient of the stoichiometric silicon nitride to be dn(Si(3)N(4))/dT=(2.45±0.09)×10(-5) (RIU/°C) and the PECVD oxide to be dn(SiO(x))/dT=(0.95±0.10)×10(-5) (RIU/°C).

Demonstration of enhanced side-mode suppression in metal-filled photonic crystal vertical cavity lasers.

Previously reported simulations have suggested that depositing thin layers of metal over the surface of a single-mode, etched air hole photonic crystal (PhC) vertical-cavity surface-emitting laser (VCSEL) could potentially improve the laser's side-mode suppression ratio by introducing additional losses to the higher-order modes. This work demonstrates the concept by presenting the results of a 30 nm thin film of Cr deposited on the surface of an implant-confined PhC VCSEL. Both experimental measurements and simulation results are in agreement showing that the single-mode operation is improved at the same injection current ratio relative to threshold.

High-capacity free-space optical communications using wavelength- and mode-division-multiplexing in the mid-infrared region.

Due to its absorption properties in atmosphere, the mid-infrared (mid-IR) region has gained interest for its potential to provide high data capacity in free-space optical (FSO) communications. Here, we experimentally demonstrate wavelength-division-multiplexing (WDM) and mode-division-multiplexing (MDM) in a ~0.5 m mid-IR FSO link. We multiplex three ~3.4 µm wavelengths (3.396 µm, 3.397 µm, and 3.398 µm) on a single polarization, with each wavelength carrying two orbital-angular-momentum (OAM) beams. As each beam carries 50-Gbit/s quadrature-phase-shift-keying data, a total capacity of 300 Gbit/s is achieved. The WDM channels are generated and detected in the near-IR (C-band). They are converted to mid-IR and converted back to C-band through the difference frequency generation nonlinear processes. We estimate that the system penalties at a bit error rate near the forward error correction threshold include the following: (i) the wavelength conversions induce ~2 dB optical signal-to-noise ratio (OSNR) penalty, (ii) WDM induces ~1 dB OSNR penalty, and (iii) MDM induces ~0.5 dB OSNR penalty. These results show the potential of using multiplexing to achieve a ~30X increase in data capacity for a mid-IR FSO link.

Engineering the spectral reflectance of microring resonators with integrated reflective elements.

We present analysis and design of microring resonators integrated with reflective elements to obtain custom wavelength-selective devices. We introduce a graphical method that transforms the complicated design problem of the integrated structure into a simple task of designing a reflective element possessing an appropriate reflection profile. Configurations for obtaining a comb mirror, a single peak mirror, an ultranarrow band transmission filter, and a sharp transition mirror are presented as examples.

At-will chromatic dispersion by prescribing light trajectories with cascaded metasurfaces.

Chromatic dispersion spatially separates white light into colours, producing rainbows and similar effects. Detrimental to imaging but essential to spectroscopy, chromatic dispersion is the result of material properties in refractive optics and is considered an inherent characteristic of diffractive devices such as gratings and flat lenses. Here, we present a fundamental relation connecting an optical system's dispersion to the trajectories light takes through it and show that arbitrary control over dispersion may be achieved by prescribing specific trajectories, even in diffractive systems. Using cascaded metasurfaces (2D arrays of sub-micron scatterers) to direct light along predetermined trajectories, we present an achromatic twisted metalens and experimentally demonstrate beam deflectors with arbitrary dispersion. This new insight and design approach usher in a new class of optical systems with wide-ranging applications.

Snapshot spectral imaging with parallel metasystems.

Spectral imagers divide scenes into quantitative and narrowband spectral channels. They have become important metrological tools in many areas of science, especially remote sensing. Here, we propose and experimentally demonstrate a snapshot spectral imager using a parallel optical processing paradigm based on arrays of metasystems. Our multi-aperture spectral imager weighs less than 20 mg and simultaneously acquires 20 image channels across the 795- to 980-nm spectral region. Each channel is formed by a metasurface-tuned filter and a metalens doublet. The doublets incorporate absorptive field stops, reducing cross-talk between image channels. We demonstrate our instrument's capabilities with both still images and video. Narrowband filtering, necessary for the device's operation, also mitigates chromatic aberration, a common problem in metasurface imagers. Similar instruments operating at visible wavelengths hold promise as compact, aberration-free color cameras. Parallel optical processing using metasystem arrays enables novel, compact instruments for scientific studies and consumer electronics.