RESUMO
MEMS (Micro Electro-Mechanical Systems) plasma analyzers are a promising possibility for future space missions but conventional instrument designs are not necessarily well suited to micro-fabrication. Here, a candidate design for a MEMS-based instrument has been prototyped using electron-discharge machining. The device features 10 electrostatic analyzers that, with a single voltage applied to it, allow five different energies of electron and five different energies of positive ion to be simultaneously sampled. It has been simulated using SIMION and the electron response characteristics tested in an instrument calibration chamber. Small deviations found in the electrode spacing of the as-built prototype were found to have some effect on the electron response characteristics but do not significantly impede its performance.