Development of an automatic approaching system for electrochemical nanofabrication using visual and force-displacement sensing.

In this paper, a fast automatic precision approaching system is developed for electrochemical nanofabrication using visual and force-displacement sensing. Before the substrate is fabricated, the template should approach the substrate accurately to establish the initial gap between the template and substrate. During the approaching process, the template is first quickly moved towards the substrate by the stepping motor until a specified gap is detected by the visual feedback. Then, the successive approach using the switch of macro-micro motion with a force-displacement sensing module is triggered to make the template contact with the substrate to nanometre accuracy. The contact force is measured by the force-displacement sensing module which employs the high-resolution capacitive displacement sensor and flexure compliant mechanism. The high sensitivity of this capacitive displacement sensor ensures high accuracy of the template-substrate contact. The experimental results show that the template can reach the substrate accurately and smoothly, which verifies the effectiveness of the proposed approaching system with the visual and the force-displacement sensing modules.

A survey on dielectric elastomer actuators for soft robots.

Conventional industrial robots with the rigid actuation technology have made great progress for humans in the fields of automation assembly and manufacturing. With an increasing number of robots needing to interact with humans and unstructured environments, there is a need for soft robots capable of sustaining large deformation while inducing little pressure or damage when maneuvering through confined spaces. The emergence of soft robotics offers the prospect of applying soft actuators as artificial muscles in robots, replacing traditional rigid actuators. Dielectric elastomer actuators (DEAs) are recognized as one of the most promising soft actuation technologies due to the facts that: i) dielectric elastomers are kind of soft, motion-generating materials that resemble natural muscle of humans in terms of force, strain (displacement per unit length or area) and actuation pressure/density; ii) dielectric elastomers can produce large voltage-induced deformation. In this survey, we first introduce the so-called DEAs emphasizing the key points of working principle, key components and electromechanical modeling approaches. Then, different DEA-driven soft robots, including wearable/humanoid robots, walking/serpentine robots, flying robots and swimming robots, are reviewed. Lastly, we summarize the challenges and opportunities for the further studies in terms of mechanism design, dynamics modeling and autonomous control.

Development of a decentralized multi-axis synchronous control approach for real-time networks.

The message scheduling and the network-induced delays of real-time networks, together with the different inertias and disturbances in different axes, make the synchronous control of the real-time network-based systems quite challenging. To address this challenge, a decentralized multi-axis synchronous control approach is developed in this paper. Due to the limitations of message scheduling and network bandwidth, error of the position synchronization is firstly defined in the proposed control approach as a subset of preceding-axis pairs. Then, a motion message estimator is designed to reduce the effect of network delays. It is proven that position and synchronization errors asymptotically converge to zero in the proposed controller with the delay compensation. Finally, simulation and experimental results show that the developed control approach can achieve the good position synchronization performance for the multi-axis motion over the real-time network.

Bio-inspired annelid robot: a dielectric elastomer actuated soft robot.

Biologically inspired robots with inherent softness and body compliance increasingly attract attention in the field of robotics. Aimed at solving existing problems with soft robots, regarding actuation technology and biological principles, this paper presents a soft bio-inspired annelid robot driven by dielectric elastomer actuators (DEAs) that can advance on flat rigid surfaces. The DEA, a kind of soft functional actuator, is designed and fabricated to mimic the axial elongation and differential friction of a single annelid body segment. Several (at least three) DEAs are connected together into a movable multi-segment robot. Bristles are attached at the bottom of some DEAs to achieve differential friction for imitating the setae of annelids. The annelid robot is controlled by periodic square waves, propagating from the posterior to the anterior, which imitate the peristaltic waves of annelids. Controlled by these waves, each DEA, one-by-one from tail to head, anchors to the ground by circumferential distention and pushes the front DEAs forward by axial elongation, enabling the robot to advance. Preliminary tests demonstrate that a 3-segment robot can reach an average speed of 5.3 mm s-1 (1.871 body lengths min-1) on flat rigid surfaces and can functionally mimic the locomotion of annelids. Compared to the existing robots that imitate terrestrial annelids our annelid robot shows advantages in terms of speed and bionics.

An experimental comparison of proportional-integral, sliding mode, and robust adaptive control for piezo-actuated nanopositioning stages.

This paper presents a comparative study of the proportional-integral (PI) control, sliding mode control (SMC), and robust adaptive control (RAC) for applications to piezo-actuated nanopositioning stages without the inverse hysteresis construction. For a fair comparison, the control parameters of the SMC and RAC are selected on the basis of the well-tuned parameters of the PI controller under same desired trajectories and sampling frequencies. The comparative results show that the RAC improves the tracking performance by 17 and 37 times than the PI controller in terms of the maximum tracking error e(m) and the root mean tracking error e(rms), respectively, while the RAC improves the tracking performance by 7 and 9 times than the SMC in terms of e(m) and e(rms), respectively.

Design, analysis and testing of a parallel-kinematic high-bandwidth XY nanopositioning stage.

This paper presents the design, analysis, and testing of a parallel-kinematic high-bandwidth XY nanopositioning stage driven by piezoelectric stack actuators. The stage is designed with two kinematic chains. In each kinematic chain, the end-effector of the stage is connected to the base by two symmetrically distributed flexure modules, respectively. Each flexure module comprises a fixed-fixed beam and a parallelogram flexure serving as two orthogonal prismatic joints. With the purpose to achieve high resonance frequencies of the stage, a novel center-thickened beam which has large stiffness is proposed to act as the fixed-fixed beam. The center-thickened beam also contributes to reducing cross-coupling and restricting parasitic motion. To decouple the motion in two axes totally, a symmetric configuration is adopted for the parallelogram flexures. Based on the analytical models established in static and dynamic analysis, the dimensions of the stage are optimized in order to maximize the first resonance frequency. Then finite element analysis is utilized to validate the design and a prototype of the stage is fabricated for performance tests. According to the results of static and dynamic tests, the resonance frequencies of the developed stage are over 13.6 kHz and the workspace is 11.2 µm × 11.6 µm with the cross-coupling between two axes less than 0.52%. It is clearly demonstrated that the developed stage has high resonance frequencies, a relatively large travel range, and nearly decoupled performance between two axes. For high-speed tracking performance tests, an inversion-based feedforward controller is implemented for the stage to compensate for the positioning errors caused by mechanical vibration. The experimental results show that good tracking performance at high speed is achieved, which validates the effectiveness of the developed stage.

Design and control of a decoupled two degree of freedom translational parallel micro-positioning stage.

This paper presents a novel decoupled two degrees of freedom (2-DOF) translational parallel micro-positioning stage. The stage consists of a monolithic compliant mechanism driven by two piezoelectric actuators. The end-effector of the stage is connected to the base by four independent kinematic limbs. Two types of compound flexure module are serially connected to provide 2-DOF for each limb. The compound flexure modules and mirror symmetric distribution of the four limbs significantly reduce the input and output cross couplings and the parasitic motions. Based on the stiffness matrix method, static and dynamic models are constructed and optimal design is performed under certain constraints. The finite element analysis results are then given to validate the design model and a prototype of the XY stage is fabricated for performance tests. Open-loop tests show that maximum static and dynamic cross couplings between the two linear motions are below 0.5% and -45 dB, which are low enough to utilize the single-input-single-out control strategies. Finally, according to the identified dynamic model, an inversion-based feedforward controller in conjunction with a proportional-integral-derivative controller is applied to compensate for the nonlinearities and uncertainties. The experimental results show that good positioning and tracking performances are achieved, which verifies the effectiveness of the proposed mechanism and controller design. The resonant frequencies of the loaded stage at 2 kg and 5 kg are 105 Hz and 68 Hz, respectively. Therefore, the performance of the stage is reasonably good in term of a 200 N load capacity.

Real-time inverse hysteresis compensation of piezoelectric actuators with a modified Prandtl-Ishlinskii model.

This paper presents a novel real-time inverse hysteresis compensation method for piezoelectric actuators exhibiting asymmetric hysteresis effect. The proposed method directly utilizes a modified Prandtl-Ishlinskii hysteresis model to characterize the inverse hysteresis effect of piezoelectric actuators. The hysteresis model is then cascaded in the feedforward path for hysteresis cancellation. It avoids the complex and difficult mathematical procedure for constructing an inversion of the hysteresis model. For the purpose of validation, an experimental platform is established. To identify the model parameters, an adaptive particle swarm optimization algorithm is adopted. Based on the identified model parameters, a real-time feedforward controller is implemented for fast hysteresis compensation. Finally, tests are conducted with various kinds of trajectories. The experimental results show that the tracking errors caused by the hysteresis effect are reduced by about 90%, which clearly demonstrates the effectiveness of the proposed inverse compensation method with the modified Prandtl-Ishlinskii model.