Extensible multi-wavelength interrogation method for arbitrary cavities in low-fineness multi-cavity Fabry-Pérot interferometric sensors.

To the best of our knowledge, a novel extensible multi-wavelength (EMW) method to interrogate arbitrary cavities in low-fineness fiber-optic multi-cavity Fabry-Pérot interferometric (LFMFPI) sensors is proposed and experimentally demonstrated. Based on the derived model of the LFMFPI sensor with any amount of cascaded cavities, theoretically, variation in each cavity of a LFMFPI sensor can be extracted simultaneously once the necessary parameters are acquired in advance. The feasibility of this method is successfully demonstrated in simulations and experiments utilizing LFMFPI sensors. In experiments with the LFMFPI sensor, optical path differences (OPD) of 78 nm and 2.95 µm introduced by temperature variation in two cavities, and the OPD induced by vibration with the amplitude from 5.891 nm to 38.116 nm were extracted, respectively. The EMW method is potential in multi-parameter sensing for pressure, vibration, and temperature.

Probe type TFBG-excited SPR fiber sensor for simultaneous measurement of multiple ocean parameters assisted by CFBG.

The tilted fiber Bragg grating(TFBG), chirped fiber Bragg grating(CFBG), Vernier effect and metal surface plasmon resonance(SPR) effect are effectively combined to form a probe type fiber sensor for simultaneous measurement of seawater salinity, temperature and depth(STD). The SPR effect excited by the TFBG is achieved by covering a gold layer around the TFBG, which is used to measure the refractive index (RI) of seawater. The core mode of TFBG is used to detect the change of seawater temperature and the measurement of TFBG reflection spectrum is realized by inscribing a CFBG after the TFBG, which makes the sensor have a probe type design and more beneficial to practical applications. The fusion of quartz micro-spheres on the end face of the sensing fiber and the parallel connection of an Fabry Perot(F-P) interference cavity enables the use of Vernier effect to detect the depth of the ocean. Femtosecond laser line-by-line method is used to the inscribing of TFBG, which allows the grating parameters to be changed flexibly depending on the desired spectrum. The experimental results show that the temperature sensitivity is 10.82pm/°C, the salinity sensitivity is 0.122nm/g/Kg, the depth sensitivity is 116.85 pm/m and the depth can be tested to 1000 m or even deeper.

High-Temperature Fiber-Optic Fabry-Perot Vibration Sensor Based on Single-Crystal Sapphire.

In this paper, a fiber-optic Fabry-Perot (F-P) vibration sensor that can work at 800 °C is proposed. The F-P interferometer is composed of an upper surface of inertial mass placed parallel to the end face of the optical fiber. The sensor was prepared by ultraviolet-laser ablation and three-layer direct-bonding technology. Theoretically, the sensor has a sensitivity of 0.883 nm/g and a resonant frequency of 20.911 kHz. The experimental results show that the sensitivity of the sensor is 0.876 nm/g in the range of 2 g to 20 g at an operating frequency of 200 Hz at 20 °C. The nonlinearity was evaluated from 20 °C to 800 °C with a nonlinear error of 0.87%. In addition, the z-axis sensitivity of the sensor was 25 times higher than that of the x-axis and y-axis. The vibration sensor will have wide high-temperature engineering-application prospects.

Fabrication of an all-silica microsphere-lens on optical fiber for free-space light coupling and sensing in extreme environments.

In this paper, an all-silica microsphere-lens was designed and fabricated on the fiber end face, which can effectively improve the coupling efficiency of free-space light. In the production process, a coreless silica fiber with specific length was spliced on the end face of the fiber and melted by a CO2 laser fusion splicer. Due to the effect of surface tension, the coreless silica fiber would form a microsphere-lens on the fiber end face and the diameter of the microsphere-lens could be adjusted by controlling the light-passing time of the CO2 laser fusion splicer. Through experiments, it can be found that the 3 dB bandwidth optical coupling distance of the microsphere-lens with a diameter of 270 µm is about 200 µm, and the focus depth is about 450 µm. In order to verify the feasibility of using the microsphere-lens in the fiber-optic Fabry-Perot sensors, a Fabry-Perot interferometer was constructed by using the microsphere-lens and the single-mode fiber end face. The experimental results showed that the interference spectrum of the Fabry-Perot interferometer has a good contrast ratio. Integrating the advantages of all-silica structure, simple manufacturing process, low cost, small size, and sturdy construction, the proposed microsphere-lens is expected to be a potential candidate for free-space light coupling and fiber-optic sensors in extreme environments.

Dual-wavelength demodulation technique for interrogating a shortest cavity in multi-cavity fiber-optic Fabry-Pérot sensors.

This paper demonstrates, for the first time, a novel demodulation technique that can be applied for interrogating a shortest cavity in multi-cavity Fabry-Pérot (F-P) sensors. In this demodulation technique, using an amplified spontaneous emission (ASE) light source and two optical fiber broadband filters, the interference only occurs in a shortest F-P cavity that is shorter than the half of the coherence length. Using a signal calibration algorithm, two low-coherence interference optical signals with similar coherence lengths were calibrated to obtain two quadrature signals. Then, the change in the cavity length of the shortest F-P cavity was interrogated by the two quadrature signals and the arctangent algorithm. The experimental results show that the demodulation technique successfully extracted 1 kHz and 500 Hz vibration signals with 39.28 µm and 64.84 µm initial cavity lengths, respectively, in a multi-cavity F-P interferometer. The demodulation speed is up to 500 kHz, and the demodulation technique makes it possible for multi-cavity F-P sensors to measure dynamic and static parameters simultaneously. The results show that the demodulation technique has wide application potential in the dynamic measurement of multi-cavity F-P sensors.

An LC Wireless Passive Pressure Sensor Based on Single-Crystal MgO MEMS Processing Technique for High Temperature Applications.

An LC wireless passive pressure sensor based on a single-crystalline magnesium oxide (MgO) MEMS processing technique is proposed and experimentally demonstrated for applications in environmental conditions of 900 °C. Compared to other high-temperature resistant materials, MgO was selected as the sensor substrate material for the first time in the field of wireless passive sensing because of its ultra-high melting point (2800 °C) and excellent mechanical properties at elevated temperatures. The sensor mainly consists of inductance coils and an embedded sealed cavity. The cavity length decreases with the applied pressure, leading to a monotonic variation in the resonant frequency of the sensor, which can be retrieved wirelessly via a readout antenna. The capacitor cavity was fabricated using a MgO MEMS technique. This MEMS processing technique, including the wet chemical etching and direct bonding process, can improve the operating temperature of the sensor. The experimental results indicate that the proposed sensor can stably operate at an ambient environment of 22-900 °C and 0-700 kPa, and the pressure sensitivity of this sensor at room temperature is 14.52 kHz/kPa. In addition, the sensor with a simple fabrication process shows high potential for practical engineering applications in harsh environments.

Least square fitting demodulation technique for the interrogation of an optical fiber Fabry-Perot sensor with arbitrary reflectivity.

A novel Fabry-Perot (F-P) demodulation technique based on least square fitting for arbitrary reflectivity F-P sensors is proposed. The demodulation method was simulated and analyzed to verify feasibility of the algorithm. Two different finesse F-P interferometers constructed with a reflector bracket were used to make the stability experiments and the stepping experiments. The results show that the demodulation technique can interrogate the cavity length of F-P interferometers with different fineness in a wide range, and the demodulation error is less than 12 nm.

MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements.

A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaphragm, and a high borosilicate glass substrate (HBGS). The integrated sensor has a high sensitivity due to the MEMS technique and the spherical end of the fiber. The results show that the sensor achieves a pressure sensitivity of approximately 0.139 mV/kPa. The temperature coefficient of the proposed sensor is about 0.87 mV/°C over the range of 20 °C to 150 °C. Furthermore, due to the intensity mechanism, the sensor has a relatively simple demodulation system and can respond to high-frequency pressure in real time. The dynamic response of the sensor was verified in a 1 kHz sinusoidal pressure environment at room temperature.

Fiber-optic Fabry-Perot pressure sensor based on sapphire direct bonding for high-temperature applications.

In this study, a fiber-optic Fabry-Perot (FP) high-temperature pressure sensor based on sapphire direct bonding is proposed and experimentally demonstrated. The sensor is fabricated by direct bonding of two-layer sapphire wafers, including a pressure diaphragm wafer and a cavity-etched wafer. The sensor is composed of a sensor head that contains a vacuum-sealed cavity arranged as an FP cavity and a multimode optical fiber. The external pressure can be measured by detecting the change in FP cavity length in the sensor. Experimental results demonstrate the sensing capabilities for pressures from 20 kPa to 700 kPa up to 800°C.

Microbubble-based fiber-optic Fabry-Perot pressure sensor for high-temperature application.

Using arc discharge technology, we fabricated a fiber-optic Fabry-Perot (FP) pressure sensor with a very low temperature coefficient based on a microbubble that can be applied in a high-temperature environment. The thin-walled microbubble can be fabricated by heating the gas-pressurized hollow silica tube (HST) using a commercial fusion splicer. Then, the well-cut single-mode fiber (SMF) was inserted into the microbubble, and they were fused together. Thus, the FP cavity can be formed between the end of the SMF and the inner surface of the microbubble. The diameter of the microbubble can be up to 360 µm with the thickness of the wall being approximately 0.5 µm. Experimental results show that such a sensor has a linear sensitivity of approximately -6.382 nm/MPa, -5.912 nm/MPa at 20°C, and 600°C within the pressure range of 1 MPa. Due to the thermal expansion coefficient of the SMF being slightly larger than that of silica, we can fuse the SMF and the HST with different lengths; thus, the sensor has a very low temperature coefficient of approximately 0.17 pm/°C.

Batch-producible MEMS fiber-optic Fabry-Perot pressure sensor for high-temperature application.

A fiber-optic Fabry-Perot pressure sensor based on a micro-electro-mechanical system (MEMS) and CO2 laser fusion technology is developed and experimentally demonstrated for high-temperature application. The sensing heads are batch-fabricated by anodically bonding the micromachined Pyrex glass wafer and local gold-plated silicon wafer. The separated sensing head and the single-mode fiber are fused together to form the Fabry-Perot cavity using the CO2 laser. In order to improve the measurement accuracy in a high-temperature environment, a fiber Bragg grating is used as a temperature sensor for temperature decoupling. The experimental results show that the fiber-optic Fabry-Perot pressure sensor has a maximum nonlinearity of 0.4%. The maximal error of the pressure after temperature decoupling is less than 1.05% over a pressure range of 0-0.5 MPa and a temperature range of 20°C-350°C. The batch fabrication technology makes the sensors low cost and high uniformity.

Fiber-optic Fabry-Perot pressure sensor based on low-temperature co-fired ceramic technology for high-temperature applications.

In this study, a novel batch-producible fiber-optic Fabry-Perot (FP) pressure sensor based on a low-temperature co-fired ceramic technology is proposed and experimentally demonstrated for high-temperature applications. The sensor is fabricated by inserting a well-cut single-mode fiber (SMF) into a zirconia fiber ferrule, followed by insertion of the overall structure into an alumina sensor head. The FP cavity in the sensor is formed by placing the end face of the SMF in parallel to the diaphragm. The external pressure can be detected by demodulating the FP cavity length of the sensor. A theoretical analysis indicates that the pressure sensitivity can be designed flexibly by adjusting the parameters of the ceramic diaphragm, radius, and thickness. Experimental results demonstrate that the pressure sensor exhibits a high linear sensitivity of approximately 0.1 µm/kPa at room temperature in the pressure range up to 160 kPa. The repeatability error and nonlinear error of three repeatable experiments are approximately 2.60% and smaller than 0.101%, respectively. The temperature coefficient and coefficient of the pressure-sensitivity changes with temperature are 0.023 µm/°C and 0.205 nm/(kPa°C) in the temperature range of 20°C-300°C.

Correction: Yan, L., et al. A Micro Bubble Structure Based Fabry⁻Perot Optical Fiber Strain Sensor with High Sensitivity and Low-Cost Characteristics Sensors, 2017, 17, 555.

An correction is presented to correct Figure 5a in [Sensors, 2017, 17, 555].

Diaphragm-Free Fiber-Optic Fabry-Perot Interferometric Gas Pressure Sensor for High Temperature Application.

A diaphragm-free fiber-optic Fabry-Perot (FP) interferometric gas pressure sensor is designed and experimentally verified in this paper. The FP cavity was fabricated by inserting a well-cut fiber Bragg grating (FBG) and hollow silica tube (HST) from both sides into a silica casing. The FP cavity length between the ends of the SMF and HST changes with the gas density. Using temperature decoupling method to improve the accuracy of the pressure sensor in high temperature environments. An experimental system for measuring the pressure under different temperatures was established to verify the performance of the sensor. The pressure sensitivity of the FP gas pressure sensor is 4.28 nm/MPa with a high linear pressure response over the range of 0.1-0.7 MPa, and the temperature sensitivity is 14.8 pm/°C under the range of 20-800 °C. The sensor has less than 1.5% non-linearity at different temperatures by using temperature decoupling method. The simple fabrication and low-cost will help sensor to maintain the excellent features required by pressure measurement in high temperature applications.

A Wide-Range Displacement Sensor Based on Plastic Fiber Macro-Bend Coupling.

This paper proposes the strategy of fabricating an all fiber wide-range displacement sensor based on the macro-bend coupling effect which causes power transmission between two twisted bending plastic optical fibers (POF), where the coupling power changes with the bending radius of the fibers. For the sensor, a structure of two twisted plastic fibers is designed with the experimental platform that we constructed. The influence of external temperature and displacement speed shifts are reported. The displacement sensor performance is the sensor test at different temperatures and speeds. The sensor was found to be satisfactory at both room temperature and 70 °C when the displacement is up to 140 mm. The output power is approximately linear to a displacement of 110 mm-140 mm under room temperature and 2 mm/s speed at 19.805 nW/mm sensitivity and 0.12 mm resolution. The simple structure of the sensor makes it reliable for other applications and further utilizations, promising a bright future.

Interface Characteristics of Sapphire Direct Bonding for High-Temperature Applications.

In this letter, we present a sapphire direct bonding method using plasma surface activation, hydrophilic pre-bonding, and high temperature annealing. Through the combination of sapphire inductively coupled plasma etching and the direct bonding process, a vacuum-sealed cavity employable for high temperature applications is achieved. Cross-sectional scanning electron microscopy (SEM) research of the bonding interface indicates that the two sapphire pieces are well bonded and the cavity structure stays intact. Moreover, the tensile testing shows that the bonding strength of the bonding interface is in excess of 7.2 MPa. The advantage of sapphire direct bonding is that it is free from the various problems caused by the mismatch in the coefficients of thermal expansion between different materials. Therefore, the bonded vacuum-sealed cavity can be potentially further developed into an all-sapphire pressure sensor for high temperature applications.

A Micro Bubble Structure Based Fabry-Perot Optical Fiber Strain Sensor with High Sensitivity and Low-Cost Characteristics.

A high-sensitivity, low-cost, ultrathin, hollow fiber micro bubble structure was proposed; such a bubble can be used to develop a high-sensitivity strain sensor based on a Fabry-Perot interferometer (FPI). The micro bubble is fabricated at the fiber tip by splicing a glass tube to a single mode fiber (SMF) and then the glass tube is filled with gas in order to expand and form a micro bubble. The sensitivity of the strain sensor with a cavity length of about 155 µm and a bubble wall thickness of about 6 µm was measured to be up to 8.14 pm/µÏµ.

A High-Temperature Piezoresistive Pressure Sensor with an Integrated Signal-Conditioning Circuit.

This paper focuses on the design and fabrication of a high-temperature piezoresistive pressure sensor with an integrated signal-conditioning circuit, which consists of an encapsulated pressure-sensitive chip, a temperature compensation circuit and a signal-conditioning circuit. A silicon on insulation (SOI) material and a standard MEMS process are used in the pressure-sensitive chip fabrication, and high-temperature electronic components are adopted in the temperature-compensation and signal-conditioning circuits. The entire pressure sensor achieves a hermetic seal and can be operated long-term in the range of -50 °C to 220 °C. Unlike traditional pressure sensor output voltage ranges (in the dozens to hundreds of millivolts), the output voltage of this sensor is from 0 V to 5 V, which can significantly improve the signal-to-noise ratio and measurement accuracy in practical applications of long-term transmission based on experimental verification. Furthermore, because this flexible sensor's output voltage is adjustable, general follow-up pressure transmitter devices for voltage converters need not be used, which greatly reduces the cost of the test system. Thus, the proposed high-temperature piezoresistive pressure sensor with an integrated signal-conditioning circuit is expected to be highly applicable to pressure measurements in harsh environments.

Passive Resistor Temperature Compensation for a High-Temperature Piezoresistive Pressure Sensor.

The main limitation of high-temperature piezoresistive pressure sensors is the variation of output voltage with operating temperature, which seriously reduces their measurement accuracy. This paper presents a passive resistor temperature compensation technique whose parameters are calculated using differential equations. Unlike traditional experiential arithmetic, the differential equations are independent of the parameter deviation among the piezoresistors of the microelectromechanical pressure sensor and the residual stress caused by the fabrication process or a mismatch in the thermal expansion coefficients. The differential equations are solved using calibration data from uncompensated high-temperature piezoresistive pressure sensors. Tests conducted on the calibrated equipment at various temperatures and pressures show that the passive resistor temperature compensation produces a remarkable effect. Additionally, a high-temperature signal-conditioning circuit is used to improve the output sensitivity of the sensor, which can be reduced by the temperature compensation. Compared to traditional experiential arithmetic, the proposed passive resistor temperature compensation technique exhibits less temperature drift and is expected to be highly applicable for pressure measurements in harsh environments with large temperature variations.

An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments.

Pressure measurements in high-temperature applications, including compressors, turbines, and others, have become increasingly critical. This paper proposes an implantable passive LC pressure sensor based on an alumina ceramic material for in situ pressure sensing in high-temperature environments. The inductance and capacitance elements of the sensor were designed independently and separated by a thermally insulating material, which is conducive to reducing the influence of the temperature on the inductance element and improving the quality factor of the sensor. In addition, the sensor was fabricated using thick film integrated technology from high-temperature materials that ensure stable operation of the sensor in high-temperature environments. Experimental results showed that the sensor accurately monitored pressures from 0 bar to 2 bar at temperatures up to 800 °C. The sensitivity, linearity, repeatability error, and hysteretic error of the sensor were 0.225 MHz/bar, 95.3%, 5.5%, and 6.2%, respectively.