1.
Opt Express
; 23(13): 16857-65, 2015 Jun 29.
Artigo
em Inglês
| MEDLINE
| ID: mdl-26191697
RESUMO
A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.