Detection Methods for Multi-Modal Inertial Gas Sensors.

We investigate the rich potential of the multi-modal motions of electrostatically actuated asymmetric arch microbeams to design higher sensitivity and signal-to-noise ratio (SNR) inertial gas sensors. The sensors are made of fixed-fixed microbeams with an actuation electrode extending over one-half of the beam span in order to maximize the actuation of asymmetry. A nonlinear dynamic reduced-order model of the sensor is first developed and validated. It is then deployed to investigate the design of sensors that exploit the spatially complex and dynamically rich motions that arise due to veering and modal hybridization between the first symmetric and the first anti-symmetric modes of the beam. Specifically, we compare among the performance of four sensors implemented on a common platform using four detection mechanisms: classical frequency shift, conventional bifurcation, modal ratio, and differential capacitance. We find that frequency shift and conventional bifurcation sensors have comparable sensitivities. On the other hand, modal interactions within the veering range and modal hybridization beyond it offer opportunities for enhancing the sensitivity and SNR of bifurcation-based sensors. One method to achieve that is to use the modal ratio between the capacitances attributed to the symmetric and asymmetric modes as a detector, which increases the detection signal by three orders of magnitude compared to a conventional bifurcation sensor. We also present a novel sensing mechanism that exploits a rigid arm extending transversely from the arch beam mid-point and placed at equal distances between two side electrodes. It uses the asymmetry of the arch beam motions to induce rotary motions and realize a differential sensor. It is found to increase the detection signal by two orders of magnitude compared to a conventional bifurcation sensor.

Built-In Packaging for Single Terminal Devices.

An alternative packaging method, termed built-in packaging, is proposed for single terminal devices, and demonstrated with an actuator application. Built-in packaging removes the requirements of wire bonding, chip carrier, PCB, probe station, interconnection elements, and even wires to drive single terminal devices. Reducing these needs simplifies operation and eliminates possible noise sources. A micro resonator device is fabricated and built-in packaged for demonstration with electrostatic actuation and optical measurement. Identical actuation performances are achieved with the most conventional packaging method, wire bonding. The proposed method offers a compact and cheap packaging for industrial and academic applications.

Built-In Packaging for Two-Terminal Devices.

Conventional packaging and interconnection methods for two-terminal devices, e.g., diodes often involve expensive and bulky equipment, introduce parasitic effects and have reliability issues. In this study, we propose a built-in packaging method and evaluate its performance compared to probing and wire bonding methods. The built-in packaging approach offers a larger overlap area, improved contact resistance, and direct connection to testing equipment. The experimental results demonstrate a 12% increase in current, an 11% reduction in resistance, and improved performance of the diode. The proposed method is promising for enhancing sensing applications, wireless power transmission, energy harvesting, and solar rectennas. Overall, the built-in packaging method offers a simpler, cheaper, more compact and more reliable packaging solution, paving the way for more efficient and advanced technologies in these domains.

Nano Groove and Prism-Structured Triboelectric Nanogenerators.

Enhancing the output power of triboelectric nanogenerators (TENGs) requires the creation of micro or nano-features on polymeric triboelectric surfaces to increase the TENGs' effective contact area and, therefore, output power. We deploy a novel bench-top fabrication method called dynamic Scanning Probe Lithography (d-SPL) to fabricate massive arrays of uniform 1 cm long and 2.5 µm wide nano-features comprising a 600 nm deep groove (NG) and a 600 nm high triangular prism (NTP). The method creates both features simultaneously in the polymeric surface, thereby doubling the structured surface area. Six thousand pairs of NGs and NTPs were patterned on a 6×5 cm2 PMMA substrate. It was then used as a mold to structure the surface of a 200 µm thick Polydimethylsiloxane (PDMS) layer. We show that the output power of the nano-structured TENG is significantly more than that of a TENG using flat PDMS films, at 12.2 mW compared to 2.2 mW, under the same operating conditions (a base acceleration amplitude of 0.8 g).

Deformable mirror-based photoacoustic remote sensing (PARS) microscopy for depth scanning.

Optically shifting the focal plane to allow depth scanning of delicate biological structures and processes in their natural environment offers an appealing alternative to conventional mechanical scanning. Our technique uses a deformable mirror-based photoacoustic remote sensing microscopy (PARS) with a focus shifting of Δz ∼ 240 µm. We achieve this by integrating a deformable mirror that functions as a varifocal mirror for axial scanning. First, the system's focal shift capability was demonstrated with USAF resolution targets and carbon fiber phantoms, followed by in-vivo visualizations of blood vessels in chicken embryo chorioallantoic membrane (CAM). This work represents an initial step toward developing a non-contact, label-free, and aberration-free PARS imaging system with axial scanning capability.