1.
Opt Lett
; 39(2): 402-4, 2014 Jan 15.
Artigo
em Inglês
| MEDLINE
| ID: mdl-24562157
RESUMO
A Fourier spectrum method to determine the dose-to-clear in a photoresist is proposed. The frequency content of scanning electron microscope resist images is used to determine whether the resist has been dissolved. Using this method, the dose to clear the resist is calculated automatically instead of via visual inspection, a method in which operator influence can affect the result.