Flexible Film Bulk Acoustic Wave Filters toward Radiofrequency Wireless Communication.

This paper presents a flexible radiofrequency filter with a central frequency of 2.4 GHz based on film bulk acoustic wave resonators (FBARs). The flexible filter consists of five air-gap type FBARs, each comprised of an aluminum nitride piezoelectric thin film sandwiched between two thin-film electrodes. By transfer printing the inorganic film structure from a silicon wafer to an ultrathin polyimide substrate, high electrical performance and mechanical flexibility are achieved. The filter has a peak insertion loss of -1.14 dB, a 3 dB bandwidth of 107 MHz, and a temperature coefficient of frequency of -27 ppm °C-1 . The passband and roll-off characteristics of the flexible filter are comparable with silicon-based commercial products. No electrical performance degradation and mechanical failure occur under bending tests with a bending radius of 2.5 mm or after 100 bending cycles. The flexible FBAR filters are believed to be promising candidates for future flexible wireless communication systems.

Highly-sensitive gas sensor based on two-dimensional material field effect transistor.

Atomically thin two-dimensional (2D) materials are ideal gas sensing materials for achieving an ultra-low detection limit, due to the high surface-to-volume ratio, low electronic noise and sensitively tunable Fermi level. However, the sensitivity of 2D materials to their surrounding environment may also severely degrade the long-term stability of sensing devices, since most of them use the same 2D material flake as both the sensing and conduction material. In this work, we report a gas sensor based on a 2D material field effect transistor (FET) which uses few-layer black phosphorus (BP), boron nitride (BN) and molybdenum disulfide (MoS2) as the top-gate, dielectric layer and conduction channel, respectively. In this device configuration, the top-gate of BP with a superior gas adsorption capability serves as the sensing material, while the conduction channel of MoS2 is isolated from ambient environment by the coverage of the BN dielectric layer. The separation of the sensing and conduction materials not only improves the long-term stability of the device, but also enables us to use different materials for gas adsorption and conduction purposes to achieve optimum sensing performances. In addition, the adsorption kinetics of the gas molecules on the sensing channel can be sensitively detected by the current/resistance variation of the conduction channel, since the adsorbed gas molecules can effectively tune the Fermi level of sensing and conduction materials (BP and MoS2, respectively) through band alignment. We experimentally demonstrated that the proposed 2D material FET not only achieved a detection limit of 3.3 ppb to NO2, but was also capable to differentiate oxidizing and reducing gases.

Flexible gas sensor based on graphene/ethyl cellulose nanocomposite with ultra-low strain response for volatile organic compounds rapid detection.

Minimizing the strain-induced undesirable effects is one of the major efforts to be made for flexible electronics. This work demonstrates a highly sensitive flexible gas sensor with ultra-low strain response, which is potentially suitable for wearable electronics applications. The gas sensing material is a free-standing and flexible thin film made of graphene/ethyl cellulose (EC) nanocomposite, which is then integrated with flexible substrate of polyethylene terephthalate. The sensor exhibits relative resistance change within 0.3% at a minimum bending radius of 3.18 mm and 0.2% at the bending radius of 5 mm after 400 bending cycles. The limited strain response attributes to several applied strategies, including using EC with high Young's modulus as the matrix material, maintaining high graphene concentration and adopting suspended device structure. In contrast to the almost negligible strain sensitivity, the sensor presents large and rapid responses toward volatile organic compounds (VOCs) at room temperature. Specifically, the sensor resistance rapidly increases upon the exposure to VOCs with detection limits ranging from 37 to 167 ppm. A preliminary demo of wearable gas sensing capability is also implemented by wearing the sensor on human hand, which successfully detects several VOCs, instead of normal hand gestures.

Organometallic Complexes Anchored to Conductive Carbon for Electrocatalytic Oxidation of Methane at Low Temperature.

Low-temperature direct methane fuel cells (DMEFCs) offer the opportunity to substantially improve the efficiency of energy production from natural gas. This study focuses on the development of well-defined platinum organometallic complexes covalently anchored to ordered mesoporous carbon (OMC) for electrochemical oxidation of methane in a proton exchange membrane fuel cell at 80 °C. A maximum normalized power of 403 µW/mg Pt was obtained, which was 5 times higher than the power obtained from a modern commercial catalyst and 2 orders of magnitude greater than that from a Pt black catalyst. The observed differences in catalytic activities for oxidation of methane are linked to the chemistry of the tethered catalysts, determined by X-ray photoelectron spectroscopy. The chemistry/activity relationships demonstrate a tangible path for the design of electrocatalytic systems for C-H bond activation that afford superior performance in DMEFC for potential commercial applications.

Low-Voltage High-Frequency Lamb-Wave-Driven Micromotors.

By leveraging the benefits of a high energy density, miniaturization and integration, acoustic-wave-driven micromotors have recently emerged as powerful tools for microfluidic actuation. In this study, a Lamb-wave-driven micromotor is proposed for the first time. This motor consists of a ring-shaped Lamb wave actuator array with a rotor and a fluid coupling layer in between. On a driving mechanism level, high-frequency Lamb waves of 380 MHz generate strong acoustic streaming effects over an extremely short distance; on a mechanical design level, each Lamb wave actuator incorporates a reflector on one side of the actuator, while an acoustic opening is incorporated on the other side to limit wave energy leakage; and on electrical design level, the electrodes placed on the two sides of the film enhance the capacitance in the vertical direction, which facilitates impedance matching within a smaller area. As a result, the Lamb-wave-driven solution features a much lower driving voltage and a smaller size compared with conventional surface acoustic-wave-driven solutions. For an improved motor performance, actuator array configurations, rotor sizes, and liquid coupling layer thicknesses are examined via simulations and experiments. The results show the micromotor with a rotor with a diameter of 5 mm can achieve a maximum angular velocity of 250 rpm with an input voltage of 6 V. The proposed micromotor is a new prototype for acoustic-wave-driven actuators and demonstrates potential for lab-on-a-chip applications.

Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance.

Microelectromechanical system (MEMS) cantilever resonators suffer from high motional impedance (Rm). This paper investigates the use of mechanically coupled multi-cantilever piezoelectric MEMS resonators in the resolution of this issue. A double-sided actuating design, which utilizes a resonator with a 2.5 µm thick AlN film as the passive layer, is employed to reduce Rm. The results of experimental and finite element analysis (FEA) show agreement regarding single- to sextuple-cantilever resonators. Compared with a standalone cantilever resonator, the multi-cantilever resonator significantly reduces Rm; meanwhile, the high quality factor (Q) and effective electromechanical coupling coefficient (Kteff2) are maintained. The 30 µm wide quadruple-cantilever resonator achieves a resonance frequency (fs) of 55.8 kHz, a Q value of 10,300, and a series impedance (Rs) as low as 28.6 kΩ at a pressure of 0.02 Pa; meanwhile, the smaller size of this resonator compared to the existing multi-cantilever resonators is preserved. This represents a significant advancement in MEMS resonators for miniaturized ultra-low-power oscillator applications.

Regulating Biomolecular Surface Interactions Using Tunable Acoustic Streaming.

Diffusion limitations and nonspecific surface absorption are great challenges for developing micro-/nanoscale affinity biosensors. There are very limited approaches that can solve these issues at the same time. Here, an acoustic streaming approach enabled by a gigahertz (GHz) resonator is presented to promote mass transfer of analytes through the jet mode and biofouling removal through the shear mode, which can be switched by tuning the deviation angle, α, between the resonator and the sensor. Simulations show that the jet mode (α ≤ 0) drives the analytes in the fluid toward the sensing surface, overcomes the diffusion limitation, and enhances the binding; while the shear mode (0 < α < π/4) provides a scouring action to remove the biofouling from the sensor. Experimental studies were performed by integrating this GHz resonator with optoelectronic sensing systems, where a 34-fold enhancement for the initial binding rate was obtained. Featuring high efficiency, controllability, and versatility, we believe that this GHz acoustic streaming approach holds promise for many kinds of biosensing systems as well as lab-on-chip systems.

Tunable nanochannel resistive pulse sensing device using a novel multi-module self-assembly.

Nanochannel-based resistive pulse sensing (nano-RPS) system is widely used for the high-sensitive measurement and characterization of nanoscale biological particles and biomolecules due to its high surface to volume ratio. However, the geometric dimensions and surface properties of nanochannel are usually fixed, which limit the detections within particular ranges or types of nanoparticles. In order to improve the flexibility of nano-RPS system, it is of great significance to develop nanochannels with tunable dimensions and surface properties. In this work, we proposed a novel multi-module self-assembly (MS) strategy which allows to shrink the geometric dimensions and tune surface properties of the nanochannels simultaneously. The MS-tuned nano-RPS device exhibits an enhanced signal-to-noise ratio (SNR) for nanoparticle detections after shrunk the geometric dimensions by MS strategy. Meanwhile, by tuning the surface charge, an enhanced resolution for viral particles detection was achieved with the MS-tuned nano-RPS devices by analyzing the variation of pulse width due the tuned surface charge. The proposed MS strategy is versatile for various types of surface materials and can be potentially applied for nanoscale surface reconfiguration in various nanofluidic devices.

Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception.

Ultrasensitive flexible pressure sensors with excellent linearity are essential for achieving tactile perception. Although microstructured dielectrics have endowed capacitive sensors with ultrahigh sensitivity, the compromise of sensitivity with increasing pressure is an issue yet to be resolved. Herein, a spontaneously wrinkled MWCNT/PDMS dielectric layer is proposed to realize the excellent sensitivity and linearity of capacitive sensors for tactile perception. The synergistic effect of a high dielectric constant and wrinkled microstructures enables the sensor to exhibit linearity up to 21 kPa with a sensitivity of 1.448 kPa-1 and a detection limit of 0.2 Pa. Owing to these merits, the sensor monitors subtle physiological signals such as various arterial pulses and respiration. This sensor is further integrated into a fully multimaterial 3D-printed soft pneumatic finger to realize material hardness perception. Eight materials with different hardness values are successfully discriminated, and the capacitance of the sensor varies linearly (R2 > 0.975) with increasing hardness. Moreover, the sensitivity to the material hardness can be tuned by controlling the inflation pressure of the soft finger. As a proof of concept, the finger is used to discriminate pork fats with different hardness, paving the way for hardness discrimination in clinical palpation.

Enhanced on-Chip modification and intracellular hydrogen peroxide detection via gigahertz acoustic streaming microfluidic platform.

Developing effective strategies for the flexible control of fluid is vital for microfluidic electrochemical biosensing. In this study, a gigahertz (GHz) acoustic streaming (AS) based sonoelectrochemical system was developed to realize an on-chip surface modification and sensitive hydrogen peroxide (H2O2) detection from living cells. The flexible and controlled fluid surrounding the electrochemical chip was optimized theoretically and applied in the sonoelectrochemical deposition of Au nanoparticles (AuNPs) first. Under the steady and fast flow stimulus of AS, AuNPs could be synthesized with a smaller and evener size distribution than the normal condition, allowing AuNPs to show an excellent peroxidase-like activity. Moreover, the AS also accelerated the mass transport of target molecules and improved the catalytic rate, leading to the enhancement of H2O2 detection, with an extremely low detection limit of 32 nM and a high sensitivity of 4.34 µA/ (mM·mm2). Finally, this system was successfully applied in tracking H2O2 release from different cell lines to distinguish the cancer cells from normal cells. This study innovatively integrated the surface modification and molecules detection process on a chip, and also proposed a simple but sensitive platform for microfluidic biosensing application.

Dielectric ceramics/TiO2/single-crystalline silicon nanomembrane heterostructure for high performance flexible thin-film transistors on plastic substrates.

A dielectric ceramics/TiO2/single-crystalline silicon nanomembrane (SiNM) heterostructure is designed and fabricated for high performance flexible thin-film transistors (TFTs). Both the dielectric ceramics (Nb2O3-Bi2O3-MgO) and TiO2 are deposited by radio frequency (RF) magnetron sputtering at room temperature, which is compatible with flexible plastic substrates. And the single-crystalline SiNM is transferred and attached to the dielectric ceramics/TiO2 layers to form the heterostructure. The experimental results demonstrate that the room temperature processed heterostructure has high quality because: (1) the Nb2O3-Bi2O3-MgO/TiO2 heterostructure has a high dielectric constant (∼76.6) and low leakage current. (2) The TiO2/single-crystalline SiNM structure has a relatively low interface trap density. (3) The band gap of the Nb2O3-Bi2O3-MgO/TiO2 heterostructure is wider than TiO2, which increases the conduction band offset between Si and TiO2, lowering the leakage current. Flexible TFTs have been fabricated with the Nb2O3-Bi2O3-MgO/TiO2/SiNM heterostructure on plastic substrates and show a current on/off ratio over 104, threshold voltage of ∼1.2 V, subthreshold swing (SS) as low as ∼0.2 V dec-1, and interface trap density of ∼1012 eV-1 cm-2. The results indicate that the dielectric ceramics/TiO2/SiNM heterostructure has great potential for high performance TFTs.

Acoustically enhanced photodetection by a black phosphorus-MoS2 van der Waals heterojunction p-n diode.

We developed a new way to enhance the photoresponsivity of a van der Waals heterojunction p-n diode using surface acoustic waves (SAWs). The diode was constructed on top of a piezoelectric LiNbO3 substrate and composed of p-type black phosphorus (BP) and n-type molybdenum disulfide (MoS2) flakes that partly overlapped with each other. This layout facilitated the applied SAWs to rapidly drive carriers out of the depletion region. In this structural design, SAWs promoted the separation of photogenerated carriers, and thus greatly increased the photocurrent. The measured photocurrent for the device with SAWs was about 103 times higher than that of the device without SAWs. The device using SAWs showed a photoresponsivity as high as 2.17 A W-1 at the wavelength of 582 nm. This excellent performance was attributed to the SAWs suppressing electron-hole recombination in the device under light illumination. Our device exhibits promise as a high-performance photodetector and reveals new possibilities for acoustic devices in optoelectronics.