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1.
Sensors (Basel) ; 18(12)2018 Dec 17.
Artigo em Inglês | MEDLINE | ID: mdl-30562969

RESUMO

In this study, an LC wireless passive humidity sensor based on MoS2 nanoflakes was proposed. The LC wireless passive humidity sensor was optimized by performing HFSS simulations and fabricated via a screen-printing technique. The MoS2 nanoflakes were characterized by laser scanning confocal microcopy, scanning electron microscope, and X-ray diffraction. The measurements show the sensor can operate stably for a long time with a hysteresis of 4% RH (relative humidity) in 10⁻95% RH. At low humidity environment (10⁻60% RH), the sensitivity of the as-prepared humidity sensor is 2.79 kHz/% RH, and a sensitivity of 76.04 kHz/% RH was realized in a high humidity environment (60⁻95% RH). In this regard, the sensing mechanism was discussed in the scope of proton transfer theory. The test results also indicate that the response time and recovery time of the prepared sensor are 10 s, 15 s, respectively and between 15~40 °C the sensitivity of sensor was not temperature-dependent in the range of 10~80% RH. In addition, the sensor shows less sensitivity to temperature in the 15⁻25 °C range at 90% RH. All of these experimental results show that the prepared LC wireless passive humidity sensor can stably monitor the rapidly changing humidity in a sealed and narrow environment for a long time.

2.
Sensors (Basel) ; 17(9)2017 Aug 25.
Artigo em Inglês | MEDLINE | ID: mdl-28841168

RESUMO

The highly sensitive pressure sensor presented in this paper aims at wireless passive sensing in a high temperature environment by using microwave backscattering technology. The structure of the re-entrant resonator was analyzed and optimized using theoretical calculation, software simulation, and its equivalent lump circuit model was first modified by us. Micro-machining and high-temperature co-fired ceramic (HTCC) process technologies were applied to fabricate the sensor, solving the common problem of cavity sealing during the air pressure loading test. In addition, to prevent the response signal from being immersed in the strong background clutter of the hermetic metal chamber, which makes its detection difficult, we proposed two key techniques to improve the signal to noise ratio: the suppression of strong background clutter and the detection of the weak backscattered signal of the sensor. The pressure sensor demonstrated in this paper works well for gas pressure loading between 40 and 120 kPa in a temperature range of 24 °C to 800 °C. The experimental results show that the sensor resonant frequency lies at 2.1065 GHz, with a maximum pressure sensitivity of 73.125 kHz/kPa.

3.
Micromachines (Basel) ; 13(7)2022 Jun 29.
Artigo em Inglês | MEDLINE | ID: mdl-35888851

RESUMO

The temperature of advanced components in aviation and aerospace fields is difficult to obtain timely. In this study, we aimed to investigate microwave backscattering technology combined with the theory of substrate integrated waveguide and resonant cavity to design a wireless passive temperature sensor and explore its potential in this field. We employed silicon carbide and aluminum ceramic as the substrate to make sensors. The interrogation antenna was designed to test the sensor, which could completely cover the working frequency of the sensor and had good radiation characteristics. Based on the test results, the silicon carbide sensor was capable of bearing a temperature limit of about 1000 °C compared to the alumina sensor. From 25 °C to 500 °C, its sensitivity was 73.68 kHz/°C. Furthermore, the sensitivity was 440 kHz/°C in the range of 501 °C to 1000 °C. Moreover, we observed the surface of this sensor by using the scanning electron microscope, and the results showed that the damage to the sensor surface film structure caused by long-term high temperature is the major reason for the failure of the sensor. In conclusion, the performance of the silicon carbide sensor is superior to the alumina sensor.

4.
Micromachines (Basel) ; 12(4)2021 Apr 19.
Artigo em Inglês | MEDLINE | ID: mdl-33921691

RESUMO

A new type of wireless passive, high sensitivity, high temperature sensor was designed to meet the real-time temperature test in the harsh aero-engine environment. The sensor consists of a complementary split ring resonator and a substrate integrated circular waveguide (CSRR-SICW) structure and is based on high temperature resistant Si3N4 ceramic as the substrate material. Temperature is measured by real-time monitoring of the resonant frequency of the sensor. In addition, the ambient temperature affects the dielectric constant of the dielectric substrate, and the resonant frequency of the sensor is determined by the dielectric constant, so the function relationship between temperature and resonant frequency can be established. The experimental results show that the resonant frequency of the sensor decreases from 11.3392 GHz to 11.0648 GHz in the range of 50-1000 °C. The sensitivity is 123 kHz/°C and 417 kHz/°C at 50-450 °C and 450-1000 °C, respectively, and the average test sensitivity is 289 kHz/°C. Compared with previously reported high temperature sensors, the average test sensitivity is approximately doubled, and the test sensitivity at 450-1000 °C is approximately three times higher. Therefore, the proposed high sensitivity sensor has promising prospects for high temperature measurement.

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