Microfabricated microfluidic platforms for creating microlens array.

The paper presents a novel and economic manufacturing process for microlens arrays (MLAs). This process uses micromilling machining, PDMS casting, and hybrid bonding between a glass substrate and PDMS membrane to create a microfluidic chip which is used for manufacturing MLAs on a PDMS substrates. MLAs of various diameters were fabricated for experiments, including 1000 µm, 500 µm, and 200 µm. The sag height of the MLAs is easily adjusted by controlling the pressure inside the microchannel to deform the PDMS membrane. Multiple experiments were conducted to characterize the performance of MLAs, the results of which demonstrate: (1) this fabrication process is able to manufacture MLAs with various dimensions and the diameter of an MLAs is determined by the size of micromilling bit and cutting path; (2) the sag height and curvature of MLAs can be controlled by the PDMS membrane thickness and the hydraulic pressure inside the microchannel; (3) an optical system was built to investigate the uniformity of MLAs and the experiment results showed uniform focal length of MLAs; (4) the resulting MLAs magnify tiny objects and significantly enhance the fluorescence signal emitted from the microchannel.

Using Micromachined Molds, Partial-curing PDMS Bonding Technique, and Multiple Casting to Create Hybrid Microfluidic Chip for Microlens Array.

In a previous study, we presented a novel manufacturing process for the creation of 6 × 6 and 8 × 8 microlens arrays (MLAs) comprising lenses with diameters of 1000 µm, 500 µm, and 200 µm within an area that covers 10 mm × 10 mm. In the current study, we revised the manufacturing process to allow for the fabrication of MLAs of far higher density (15 × 15 and 29 × 29 within the same area). In this paper, we detail the revised manufacturing scheme, including the micromachining of molds, the partial-curing polydimethylsiloxane (PDMS) bonding used to fuse the glass substrate and PDMS, and the multi-step casting process. The primary challenges that are involved in creating MLAs of this density were ensuring uniform membrane thickness and preventing leakage between the PDMS and glass substrate. The experiment results demonstrated that the revised fabrication process is capable of producing high density arrays: Design I produced 15 × 15 MLAs with lens diameter of 0.5 mm and fill factor of 47.94%, while Design II produced 29 × 29 MLAs with lens diameter of 0.25 mm and fill factor of 40.87%. The partial-curing PDMS bonding system also proved to be effective in fusing PDMS with glass (maximum bonding strength of approximately six bars). Finally, the redesigned mold was used to create PDMS membranes of high thickness uniformity (coefficient of variance <0.07) and microlenses of high lens height uniformity (coefficient of variance <0.15).

Micromachining Microchannels on Cyclic Olefin Copolymer (COC) Substrates with the Taguchi Method.

Micromilling is a straightforward approach to the manufacture of polymer microfluidic devices for applications in chemistry and biology. This fabrication process reduces costs, provides a relatively simple user interface, and enables the fabrication of complex structures, which makes it ideal for the development of prototypes. In this study, we investigated the influence of micromilling parameters on the surface roughness of a cyclic olefin copolymer (COC) substrate. We then employed factor analysis to determine the optimal cutting conditions. The parameters used in all experiments were the spindle speed, the feed rate, and the depth of cut. Roughness was measured using a stylus profilometer. The lowest roughness was 0.173 µm at a spindle speed of 20,000 rpm, feed rate of 300 mm/min, and cut depth of 20 µm. Factor analysis revealed that the feed rate has the greatest impact on surface quality, whereas the depth of cut has the least impact.