Spin-coated and PECVD low dielectric constant porous organosilicate films studied by 1D and 2D solid-state NMR.

Gerbaud, Guillaume; Hediger, Sabine; Bardet, Michel; Favennec, Laurent; Zenasni, Aziz; Beynet, Julien; Gourhant, Olivier; Jousseaume, Vincent

Gerbaud, Guillaume; Hediger, Sabine; Bardet, Michel; Favennec, Laurent; Zenasni, Aziz; Beynet, Julien; Gourhant, Olivier; Jousseaume, Vincent.

Affiliation

Gerbaud G; CEA, INAC, SCIB (UMR-E3 UJF/CEA and FRE 3200 CNRS/CEA), Laboratoire de Résonances Magnétiques, F-38054 Grenoble, France. guillaume.gerbaud@cea.fr

Phys Chem Chem Phys ; 11(42): 9729-37, 2009 Nov 14.

Article in En | MEDLINE | ID: mdl-19851550

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Full text: 1 Database: MEDLINE Language: En Journal: Phys Chem Chem Phys Journal subject: BIOFISICA / QUIMICA Year: 2009 Type: Article Affiliation country: France

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Full text: 1 Database: MEDLINE Language: En Journal: Phys Chem Chem Phys Journal subject: BIOFISICA / QUIMICA Year: 2009 Type: Article Affiliation country: France