Radiometry and metrology of a phase zone plate measured by extreme ultraviolet synchrotron radiation.
Appl Opt
; 48(31): 5970-7, 2009 Nov 01.
Article
in En
| MEDLINE
| ID: mdl-19881664
ABSTRACT
The diffraction efficiency, focal length, and other radiometric and metrology properties of a phase zone plate were measured by using monochromatic synchrotron radiation in the 7-18.5 nm wavelength range. The zone plate was composed of molybdenum zones having a 4 mm outer diameter and 70 nm nominal thickness and supported on a 100 nm thick silicon nitride membrane. The diffraction efficiency was enhanced by the phase shift of the radiation passing through the zones. The measured first-order efficiency was in good agreement with the calculated efficiency. The properties of the zone plate, particularly the small variation of the efficiency with off-axis angle, make it suitable for use in a radiometer to accurately measure the absolutely calibrated extreme ultraviolet emission from the Sun.
Full text:
1
Database:
MEDLINE
Language:
En
Journal:
Appl Opt
Year:
2009
Type:
Article
Affiliation country:
United States