A row-column addressed micromachined ultrasonic transducer array for surface scanning applications.

Wong, Lawrence L P; Chen, Albert I H; Li, Zhenhao; Logan, Andrew S; Yeow, John T W.

Affiliation

Wong LL; Advanced Micro-/Nano-Devices Lab., Department of Systems Design Engineering and Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada.
Chen AI; Advanced Micro-/Nano-Devices Lab., Department of Systems Design Engineering and Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada.
Li Z; Advanced Micro-/Nano-Devices Lab., Department of Systems Design Engineering and Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada.
Logan AS; Advanced Micro-/Nano-Devices Lab., Department of Systems Design Engineering and Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada.
Yeow JT; Advanced Micro-/Nano-Devices Lab., Department of Systems Design Engineering and Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West, Waterloo, ON N2L 3G1, Canada. Electronic address: jyeow@uwaterloo.ca.

Ultrasonics ; 54(8): 2072-80, 2014 Dec.

Article in En | MEDLINE | ID: mdl-25066888