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Effect of Nitrogen Flow Ratio on Composition, Microstructure, and Mechanical Properties of Cr-B-O-N Films Deposited by Pulsed Direct Current Magnetron Sputtering.
Ding, Ji Cheng; Zhang, Teng Fei; Jin, Rong Guang; Lee, Damin; Wang, Qi Min; Kim, Kwang Ho.
Affiliation
  • Ding JC; School of Convergence Science, Pusan National University, Busan 46241, South Korea.
  • Zhang TF; School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.
  • Jin RG; School of Convergence Science, Pusan National University, Busan 46241, South Korea.
  • Lee D; School of Convergence Science, Pusan National University, Busan 46241, South Korea.
  • Wang QM; School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.
  • Kim KH; Global Frontier R&D Center for Hybrid Interface Materials, Pusan National University, Busan 46241, South Korea.
J Nanosci Nanotechnol ; 19(10): 6826-6833, 2019 Oct 01.
Article in En | MEDLINE | ID: mdl-31027037
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Full text: 1 Database: MEDLINE Language: En Journal: J Nanosci Nanotechnol Year: 2019 Type: Article Affiliation country: South Korea
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Full text: 1 Database: MEDLINE Language: En Journal: J Nanosci Nanotechnol Year: 2019 Type: Article Affiliation country: South Korea