Ultralow-dielectric-constant amorphous boron nitride.
Nature
; 582(7813): 511-514, 2020 06.
Article
in En
| MEDLINE
| ID: mdl-32581381
Full text:
1
Database:
MEDLINE
Language:
En
Journal:
Nature
Year:
2020
Type:
Article
Affiliation country:
South Korea