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Second harmonic generation and simplified bond hyperpolarizability model analyses on the intermixing of Si/SiGe stacked multilayers for gate-all-around structure.
Chen, Wei-Ting; Yen, Ting-Yu; Hung, Yang-Hao; Huang, Yu-Hsiang; Chiu, Shang-Jui; Lo, Kuang-Yao.
Affiliation
  • Chen WT; Department of Physics, National Cheng Kung University, Tainan 70101, Taiwan.
  • Yen TY; Department of Physics, National Cheng Kung University, Tainan 70101, Taiwan.
  • Hung YH; Department of Physics, National Cheng Kung University, Tainan 70101, Taiwan.
  • Huang YH; Department of Physics, National Cheng Kung University, Tainan 70101, Taiwan.
  • Chiu SJ; National Synchrotron Radiation Research Center, Hsinchu 300, Taiwan.
  • Lo KY; Department of Physics, National Cheng Kung University, Tainan 70101, Taiwan.
Nanotechnology ; 34(14)2023 Jan 25.
Article in En | MEDLINE | ID: mdl-36626806

Full text: 1 Database: MEDLINE Type of study: Prognostic_studies Language: En Journal: Nanotechnology Year: 2023 Type: Article Affiliation country: Taiwan

Full text: 1 Database: MEDLINE Type of study: Prognostic_studies Language: En Journal: Nanotechnology Year: 2023 Type: Article Affiliation country: Taiwan