Second harmonic generation and simplified bond hyperpolarizability model analyses on the intermixing of Si/SiGe stacked multilayers for gate-all-around structure.
Nanotechnology
; 34(14)2023 Jan 25.
Article
in En
| MEDLINE
| ID: mdl-36626806
Full text:
1
Database:
MEDLINE
Type of study:
Prognostic_studies
Language:
En
Journal:
Nanotechnology
Year:
2023
Type:
Article
Affiliation country:
Taiwan