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Direct Processing of PVD Hard Coatings via Focused Ion Beam Milling for Microinjection Molding.
Ruehl, Holger; Guenther, Thomas; Zimmermann, André.
Affiliation
  • Ruehl H; Institute for Micro Integration (IFM), Faculty 7-Engineering Design, Production Engineering and Automotive Engineering, University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany.
  • Guenther T; Institute for Micro Integration (IFM), Faculty 7-Engineering Design, Production Engineering and Automotive Engineering, University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany.
  • Zimmermann A; Institute for Micro Integration (IFM), Faculty 7-Engineering Design, Production Engineering and Automotive Engineering, University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany.
Micromachines (Basel) ; 14(2)2023 Jan 22.
Article in En | MEDLINE | ID: mdl-36837994
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Full text: 1 Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2023 Type: Article Affiliation country: Germany
Fulltext
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Full text: 1 Database: MEDLINE Language: En Journal: Micromachines (Basel) Year: 2023 Type: Article Affiliation country: Germany