High-fidelity source mask optimization for suppressing line-end shortening.
Appl Opt
; 63(2): 327-337, 2024 Jan 10.
Article
in En
| MEDLINE
| ID: mdl-38227225
Full text:
1
Database:
MEDLINE
Language:
En
Journal:
Appl Opt
Year:
2024
Type:
Article