Symmetry-preserving modeling for lithographic imaging.
Opt Lett
; 49(14): 4038-4041, 2024 Jul 15.
Article
in En
| MEDLINE
| ID: mdl-39008770
ABSTRACT
In computational imaging and lithography, it has been a challenge for a numerical model to faithfully preserve symmetries in the physical imaging system. In this Letter, we present a project-to-symmetry-subspace (PTSS) method to prevent symmetry loss during the iterative generation of optical kernels. Essentially, PTSS is to project iterative vectors onto a predefined symmetric subspace when decomposing the transmission cross coefficient (TCC). Simulation results demonstrate the PTSS-generation of a truncated set of optical kernels that are substantially free of symmetry error, regardless of the order of truncation.
Full text:
1
Database:
MEDLINE
Language:
En
Journal:
Opt Lett
Year:
2024
Type:
Article