Correlation between the Carbon Nanotube Growth Rate and Byproducts in Antenna-Type Remote Plasma Chemical Vapor Deposition Observed by Vacuum Ultraviolet Absorption Spectroscopy.

Inaba, Masafumi; Ochiai, Takumi; Ohara, Kazuyoshi; Kato, Ryogo; Maki, Tasuku; Ohashi, Toshiyuki; Kawarada, Hiroshi

Inaba, Masafumi; Ochiai, Takumi; Ohara, Kazuyoshi; Kato, Ryogo; Maki, Tasuku; Ohashi, Toshiyuki; Kawarada, Hiroshi.

Afiliación

Inaba M; Graduate School of Advanced Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo, 169-8555, Japan.
Ochiai T; Institute of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa, Nagoya, 464-8603, Japan.
Ohara K; Graduate School of Advanced Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo, 169-8555, Japan.
Kato R; Graduate School of Advanced Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo, 169-8555, Japan.
Maki T; Graduate School of Advanced Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo, 169-8555, Japan.
Ohashi T; Graduate School of Advanced Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo, 169-8555, Japan.
Kawarada H; Graduate School of Advanced Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo, 169-8555, Japan.

Small ; 15(48): e1901504, 2019 Nov.

Article en En | MEDLINE | ID: mdl-31348615

Palabras clave

carbon nanotubes; ethylene; plasma enhanced CVD; vacuum ultraviolet; vinyl radicals

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Texto completo: 1 Bases de datos: MEDLINE Idioma: En Revista: Small Asunto de la revista: ENGENHARIA BIOMEDICA Año: 2019 Tipo del documento: Article País de afiliación: Japón

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