Design and Fabrication of Micro/Nano Sensors and Actuators.
Micromachines (Basel)
; 15(6)2024 May 22.
Article
en En
| MEDLINE
| ID: mdl-38930644
ABSTRACT
A micro-electromechanical system (MEMS) is a micro device or system that utilizes large-scale integrated circuit manufacturing technology and microfabrication technology to integrate microsensors, micro-actuators, microstructures, signal processing and control circuits, power supplies, and communication interfaces into one or more chips [...].
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Bases de datos:
MEDLINE
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En
Revista:
Micromachines (Basel)
Año:
2024
Tipo del documento:
Article
País de afiliación:
China