Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength.
Opt Lett
; 37(24): 5100-2, 2012 Dec 15.
Article
em En
| MEDLINE
| ID: mdl-23258018
ABSTRACT
Fresnel zone plates are used for imaging at extreme ultraviolet and soft x-ray wavelengths. Fabricating these zone plates is challenging due to small structure sizes (<150 nm) and complex nanostructuring processes. Fabrication techniques such as electron-beam lithography followed by etching and electroplating processes have been developed over the years. We are reporting on the development of a technique incorporating focused gallium ion-beam lithography to fabricate Fresnel zone plates with 120 nm outermost structure size in a process that combines pattern exposure and structure transfer in one single step. The fabricated zone plates were successfully applied in a microscopic setup at λ=13 nm wavelength.
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Bases de dados:
MEDLINE
Idioma:
En
Revista:
Opt Lett
Ano de publicação:
2012
Tipo de documento:
Article
País de afiliação:
Alemanha