Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition.

Fowlkes, Jason D; Winkler, Robert; Lewis, Brett B; Stanford, Michael G; Plank, Harald; Rack, Philip D

Fowlkes, Jason D; Winkler, Robert; Lewis, Brett B; Stanford, Michael G; Plank, Harald; Rack, Philip D.

Afiliação

Fowlkes JD; Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory , Oak Ridge, Tennessee 37831, United States.
Winkler R; Materials Science and Engineering Department, The University of Tennessee , Knoxville, Tennessee 37996, United States.
Lewis BB; Graz Centre for Electron Microscopy , Steyrergasse 17, 8010 Graz, Austria.
Stanford MG; Materials Science and Engineering Department, The University of Tennessee , Knoxville, Tennessee 37996, United States.
Plank H; Materials Science and Engineering Department, The University of Tennessee , Knoxville, Tennessee 37996, United States.
Rack PD; Graz Centre for Electron Microscopy , Steyrergasse 17, 8010 Graz, Austria.

ACS Nano ; 10(6): 6163-72, 2016 06 28.

Article em En | MEDLINE | ID: mdl-27284689

Palavras-chave

3D nanoprinting; direct-write; focused electron beam induced deposition; nanofabrication

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Texto completo: 1 Bases de dados: MEDLINE Idioma: En Revista: ACS Nano Ano de publicação: 2016 Tipo de documento: Article País de afiliação: Estados Unidos