Laser processing of alumina ceramic by spatially and temporally superposing the millisecond pulse and nanosecond pulse train.

ABSTRACT

A novel combined laser pulses (CLPs) consisting of a millisecond (ms) pulse and an assisted nanosecond (ns) pulse train was proposed for drilling alumina ceramic. The processing efficiency and quality were well improved by spatially and temporally superposing the ms and ns laser beams. As a result, due to the multi-reflection of keyhole and ejection of melt, the temporally superposed CLPs could decrease the energy consumption of the drilling by an order of magnitude compared with the conventional ms pulse. On the other hand, the spatial distribution of the ns laser on the focal plane was elliptical due to the off-axis distortion of the optical system. However, since the reflection of the laser in the keyhole was non-uniform, the spatially superposed CLPs showed no dependence on the shape of the focused elliptical ns laser spot in terms of the drilling quality. The research results have an important guiding for improving the efficiency and quality of laser processing, especially for the alumina ceramic laser processing.