Selective Gas-Phase Functionalization of SiO2 and SiNx Surfaces with Hydrocarbons.

Gasvoda, Ryan J; Xu, Wanxing; Zhang, Zhonghao; Wang, Scott; Hudson, Eric A; Agarwal, Sumit

Selective Gas-Phase Functionalization of SiO₂ and SiN_x Surfaces with Hydrocarbons.

Gasvoda, Ryan J; Xu, Wanxing; Zhang, Zhonghao; Wang, Scott; Hudson, Eric A; Agarwal, Sumit.

Afiliação

Gasvoda RJ; Chemical and Biological Engineering, Colorado School of Mines, Golden, Colorado 80401, United States.
Xu W; Chemical and Biological Engineering, Colorado School of Mines, Golden, Colorado 80401, United States.
Zhang Z; Lam Research Corporation, 4650 Cushing Parkway, Fremont, California 94538, United States.
Wang S; Lam Research Corporation, 4650 Cushing Parkway, Fremont, California 94538, United States.
Hudson EA; Lam Research Corporation, 4650 Cushing Parkway, Fremont, California 94538, United States.
Agarwal S; Chemical and Biological Engineering, Colorado School of Mines, Golden, Colorado 80401, United States.

Langmuir ; 37(13): 3960-3969, 2021 Apr 06.

Article em En | MEDLINE | ID: mdl-33729812

Texto completo

Adicionar na Minha BVS

Imprimir

XML

PubMed Links

Buscar no Google

Texto completo: 1 Bases de dados: MEDLINE Idioma: En Revista: Langmuir Assunto da revista: QUIMICA Ano de publicação: 2021 Tipo de documento: Article País de afiliação: Estados Unidos

Texto completo

Adicionar na Minha BVS

Imprimir

XML

PubMed Links

Buscar no Google