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Residue-free suspended graphene transferred by perforated template.
Kim, Sang-Min; Lee, Choong-Kwang; Yoon, Sung-Uk; Kim, Kyung-Shik; Hwangbo, Yun.
Afiliação
  • Kim SM; Department of Nano-mechanics, Korea Institute of Machinery & Materials (KIMM), Gajeongbuk-ro 156, Yuseong-gu, Daejeon, Republic of Korea.
  • Lee CK; Central Research Institute, KCC Corporation, Yongin-si 16891, Gyeonggi-do, Republic of Korea.
  • Yoon SU; Department of Nano-mechanics, Korea Institute of Machinery & Materials (KIMM), Gajeongbuk-ro 156, Yuseong-gu, Daejeon, Republic of Korea.
  • Kim KS; Department of Nano-mechatronics, University of Science and Technology (UST), Gajeongbuk-ro 217, Yuseong-gu, Daejeon, Republic of Korea.
  • Hwangbo Y; Department of Nano-mechanics, Korea Institute of Machinery & Materials (KIMM), Gajeongbuk-ro 156, Yuseong-gu, Daejeon, Republic of Korea.
Nanotechnology ; 33(16)2022 Jan 28.
Article em En | MEDLINE | ID: mdl-34952534
ABSTRACT
A residue-free transfer method for graphene is proposed in this study, especially for the fabrication of suspended structures. Using perforated polymer templates, graphene can be precisely transferred onto the specific position in the perforated target SiO2/Si substrates without the need for polymer removal and the subsequent thermal annealing process. The surface of the transferred graphene by the proposed method was analyzed and corroborated via Raman spectroscopy, Fourier transform infrared spectroscopy, transmission electron microscopy. The results of these analyses suggest that the graphene surface has no polymeric residues resulting from the transfer process. The proposed method provides a powerful approach for the transfer of 2D materials and it enables the exploitation of their suspended structures for device applications as well as the physical characterizations without worry on the effect of contaminants.
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Texto completo: 1 Bases de dados: MEDLINE Idioma: En Revista: Nanotechnology Ano de publicação: 2022 Tipo de documento: Article

Texto completo: 1 Bases de dados: MEDLINE Idioma: En Revista: Nanotechnology Ano de publicação: 2022 Tipo de documento: Article