Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors.

Thormählen, Lars; Seidler, Dennis; Schell, Viktor; Munnik, Frans; McCord, Jeffrey; Meyners, Dirk

Thormählen, Lars; Seidler, Dennis; Schell, Viktor; Munnik, Frans; McCord, Jeffrey; Meyners, Dirk.

Afiliação

Thormählen L; Institute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany.
Seidler D; Institute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany.
Schell V; Institute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany.
Munnik F; Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR), 01328 Dresden, Germany.
McCord J; Institute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany.
Meyners D; Institute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany.

Sensors (Basel) ; 21(24)2021 Dec 15.

Article em En | MEDLINE | ID: mdl-34960478

Palavras-chave

ERDA; FeCoSiB; SAW; XRD; film stress; magnetic domains; magnetic field sensor; magnetic properties; magnetron sputter deposition

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Texto completo: 1 Bases de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2021 Tipo de documento: Article País de afiliação: Alemanha