Sub-10 nm Precision Engineering of Solid-State Defects via Nanoscale Aperture Array Mask.
Nano Lett
; 22(4): 1672-1679, 2022 Feb 23.
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em En
| MEDLINE
| ID: mdl-35133163
ABSTRACT
Engineering a strongly interacting uniform qubit cluster would be a major step toward realizing a scalable quantum system for quantum sensing and a node-based qubit register. For a solid-state system that uses a defect as a qubit, various methods to precisely position defects have been developed, yet the large-scale fabrication of qubits within the strong coupling regime at room temperature continues to be a challenge. In this work, we generate nitrogen vacancy (NV) color centers in diamond with sub-10 nm scale precision using a combination of nanoscale aperture arrays (NAAs) with a high aspect ratio of 10 and a secondary E-beam hole pattern used as an ion-blocking mask. We perform optical and spin measurements on a cluster of NV spins and statistically investigate the effect of the NAAs during an ion-implantation process. We discuss how this technique is effective for constructing a scalable system.
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MEDLINE
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En
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Nano Lett
Ano de publicação:
2022
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Article