Development of a confocal line-scan laser scattering probe for dark-field surface defects detection of transmissive optics.

Dark-field detection has long been used to identify micron/submicron-sized surface defects benefiting from the broadening effect of the actual defect size caused by light scattering. However, the back-side scattering of a transmissive optical slab is inevitably confused with the front-side scattering phenomenon, resulting in deterioration of the signal-to-noise ratio (SNR) of the scattering signal and false alarms for real defect detection. To this end, a confocal line-scan laser scattering probe equipped with optical sectioning ability is proposed to separate the back-side scattering from the front-side scattering. The optical sectioning ability is realized through a confocal light scattering collector, which overcomes the restriction imposed on the numerical aperture (NA) and the field of view (FOV), reaching an FOV length of 90 mm and NA of 0.69. The line-scan principle of the probe protects itself from crosstalk because it produces only a laser spot on the tested surface in an instant. Experimental results verified that the probe has a line-scan length of 90 mm with a uniformity better than 98%, an rms electronic noise of 3.4 mV, and an rms background noise of 6.4 mV with laser on. The probe can reject the false back-side scattering light for a 2 mm thick fused silica slab at 17.1 dB SNR and operate at a high imaging efficiency of 720 mm2/s with a minimum detectability limit of 1.4 µm at 12 dB SNR. This work put forward an effective method with great application value for submicron-sized defect detection in transmissive optics.