Super-tetragonal Sr4Al2O7 as a sacrificial layer for high-integrity freestanding oxide membranes.

Zhang, Jinfeng; Lin, Ting; Wang, Ao; Wang, Xiaochao; He, Qingyu; Ye, Huan; Lu, Jingdi; Wang, Qing; Liang, Zhengguo; Jin, Feng; Chen, Shengru; Fan, Minghui; Guo, Er-Jia; Zhang, Qinghua; Gu, Lin; Luo, Zhenlin; Si, Liang; Wu, Wenbin; Wang, Lingfei

Super-tetragonal Sr₄Al₂O₇ as a sacrificial layer for high-integrity freestanding oxide membranes.

Zhang, Jinfeng; Lin, Ting; Wang, Ao; Wang, Xiaochao; He, Qingyu; Ye, Huan; Lu, Jingdi; Wang, Qing; Liang, Zhengguo; Jin, Feng; Chen, Shengru; Fan, Minghui; Guo, Er-Jia; Zhang, Qinghua; Gu, Lin; Luo, Zhenlin; Si, Liang; Wu, Wenbin; Wang, Lingfei.

Afiliação

Zhang J; Hefei National Research Center for Physical Sciences at Microscale, University of Science and Technology of China, Hefei 230026, China.
Lin T; Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China.
Wang A; Hefei National Research Center for Physical Sciences at Microscale, University of Science and Technology of China, Hefei 230026, China.
Wang X; School of Physics, Northwest University, Xi'an 710127, China.
He Q; National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230026, China.
Ye H; Hefei National Research Center for Physical Sciences at Microscale, University of Science and Technology of China, Hefei 230026, China.
Lu J; Hefei National Research Center for Physical Sciences at Microscale, University of Science and Technology of China, Hefei 230026, China.
Wang Q; Hefei National Research Center for Physical Sciences at Microscale, University of Science and Technology of China, Hefei 230026, China.
Liang Z; Hefei National Research Center for Physical Sciences at Microscale, University of Science and Technology of China, Hefei 230026, China.
Jin F; Hefei National Research Center for Physical Sciences at Microscale, University of Science and Technology of China, Hefei 230026, China.
Chen S; Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China.
Fan M; Hefei National Research Center for Physical Sciences at Microscale, University of Science and Technology of China, Hefei 230026, China.
Guo EJ; Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China.
Zhang Q; Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China.
Gu L; Beijing National Center for Electron Microscopy and Laboratory of Advanced Materials, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China.
Luo Z; National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230026, China.
Si L; School of Physics, Northwest University, Xi'an 710127, China.
Wu W; Institut für Festkörperphysik, TU Wien, 1040 Vienna, Austria.
Wang L; Hefei National Research Center for Physical Sciences at Microscale, University of Science and Technology of China, Hefei 230026, China.

Science ; 383(6681): 388-394, 2024 Jan 26.

Article em En | MEDLINE | ID: mdl-38271502

ABSTRACT

ABSTRACT

Identifying a suitable water-soluble sacrificial layer is crucial to fabricating large-scale freestanding oxide membranes, which offer attractive functionalities and integrations with advanced semiconductor technologies. Here, we introduce a water-soluble sacrificial layer, "super-tetragonal" Sr4Al2O7 (SAOT). The low-symmetric crystal structure enables a superior capability to sustain epitaxial strain, allowing for broad tunability in lattice constants. The resultant structural coherency and defect-free interface in perovskite ABO3/SAOT heterostructures effectively restrain crack formation during the water release of freestanding oxide membranes. For a variety of nonferroelectric oxide membranes, the crack-free areas can span up to a millimeter in scale. This compelling feature, combined with the inherent high water solubility, makes SAOT a versatile and feasible sacrificial layer for producing high-quality freestanding oxide membranes, thereby boosting their potential for innovative device applications.

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Texto completo: 1 Bases de dados: MEDLINE Idioma: En Revista: Science Ano de publicação: 2024 Tipo de documento: Article País de afiliação: China