Removal of scratches on fused silica optics by using a CO2laser.

We investigate the efficiency of local CO2laser processing of scratches on silica optics in order to enhance the nanosecond UV-laser damage resistance. The surface deformations induced by the process have been measured for different CO2laser parameters and then the pulse duration and the beam diameter have been chosen accordingly to limit those deformations below 1 µm. From the study of the laser damage resistance as a function of different material modifications we identify a range of optimal radiation parameters allowing a complete elimination of scratches associated with a high threshold of laser damage. Calculation of the temperature of silica using a two-dimensional axi-symmetric code was compared with experiment, supporting an optimization of the laser parameter as a function of the maximal dimensions of scratches that could be removed by this process.

Impact of two CO(2) laser heatings for damage repairing on fused silica surface.

CO(2) laser is an interesting tool to repair defects on silica optics. We studied UV nanosecond laser-induced damage in fused silica after CO(2) laser heating. The localization of damage sites and the laser damage threshold are closely related to stress area in silica induced by heating. By applying a suitable second laser heating, we managed to eliminate the debris issued from redeposited silica and to modify the stress area. As a consequence, a significant increase of laser resistance has been observed. This process offers the possibility to improve damage repairing sufficiently to extend the lifetime of the silica components.

Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy.

We report an experimental investigation of fluorescence confocal microscopy as a tool to measure subsurface damage on grinded fused silica optics. Confocal fluorescence microscopy was performed with an excitation at the wavelength of 405 nm on fixed abrasive diamond grinded fused silica samples. We detail the measured fluorescence spectrums and compare them to those of oil based coolants and grinding slurries. We evidence that oil based coolant used in diamond grinding induces a fluorescence that marks the subsurface damages and eases its observation. Such residual traces might also be involved in the laser damage process.

Subsurface damage measurement of ground fused silica parts by HF etching techniques.

Detection and measurement of subsurface damage of ground optical surfaces are of major concern in the assessment of high damage thresholds fused silica optics for high power laser applications. We herein detail a new principle of SSD measurement based on the utilization of HF acid etching. We also review and compare different subsurface damage (SSD) characterization techniques applied to ground and fine ground fused silica samples. We demonstrate good concordance between the different measurements.