On-chip Kerr parametric oscillation with integrated heating for enhanced frequency tuning and control.

Nonlinear microresonators can convert light from chip-integrated sources into new wavelengths within the visible and near-infrared spectrum. For most applications, such as the interrogation of quantum systems with specific transition wavelengths, tuning the frequency of converted light is critical. Nonetheless, demonstrations of wavelength conversion have mostly overlooked this metric. Here, we apply efficient integrated heaters to tune the idler frequency produced by the Kerr optical parametric oscillation in a silicon nitride microring across a continuous 1.5 terahertz range. Finally, we suppress idler frequency noise between DC and 5 kHz by several orders of magnitude using feedback to the heater drive.

An optical-frequency synthesizer using integrated photonics.

Optical-frequency synthesizers, which generate frequency-stable light from a single microwave-frequency reference, are revolutionizing ultrafast science and metrology, but their size, power requirement and cost need to be reduced if they are to be more widely used. Integrated-photonics microchips can be used in high-coherence applications, such as data transmission 1 , highly optimized physical sensors 2 and harnessing quantum states 3 , to lower cost and increase efficiency and portability. Here we describe a method for synthesizing the absolute frequency of a lightwave signal, using integrated photonics to create a phase-coherent microwave-to-optical link. We use a heterogeneously integrated III-V/silicon tunable laser, which is guided by nonlinear frequency combs fabricated on separate silicon chips and pumped by off-chip lasers. The laser frequency output of our optical-frequency synthesizer can be programmed by a microwave clock across 4 terahertz near 1,550 nanometres (the telecommunications C-band) with 1 hertz resolution. Our measurements verify that the output of the synthesizer is exceptionally stable across this region (synthesis error of 7.7 × 10-15 or below). Any application of an optical-frequency source could benefit from the high-precision optical synthesis presented here. Leveraging high-volume semiconductor processing built around advanced materials could allow such low-cost, low-power and compact integrated-photonics devices to be widely used.

Scalable and robust beam shaping using apodized fish-bone grating couplers.

Efficient power coupling between on-chip guided and free-space optical modes requires precision spatial mode matching with apodized grating couplers. Yet, grating apodizations are often limited by the minimum feature size of the fabrication approach. This is especially challenging when small feature sizes are required to fabricate gratings at short wavelengths or to achieve weakly scattered light for large-area gratings. Here, we demonstrate a fish-bone grating coupler for precision beam shaping and the generation of millimeter-scale beams at 461 nm wavelength. Our design decouples the minimum feature size from the minimum achievable optical scattering strength, allowing smooth turn-on and continuous control of the emission. Our approach is compatible with commercial foundry photolithography and has reduced sensitivity to both the resolution and the variability of the fabrication approach compared to subwavelength meta-gratings, which often require electron beam lithography.

Meta-grating outcouplers for optimized beam shaping in the visible.

Accurate coupling between optical modes at the interface between photonic chips and free space is required for the development of many on-chip devices. This control is critical in quantum technologies where large-diameter beams with designed mode profiles are required. Yet, these designs are often difficult to achieve at shorter wavelengths where fabrication limits the resolution of designed devices. In this work we demonstrate optimized outcoupling of free-space beams at 461 nm using a meta-grating approach that achieves a 16 dB improvement in the apodized outcoupling strength. We design and fabricate devices, demonstrating accurate reproduction of beams with widths greater than 100 µm.

Impact of the precursor gas ratio on dispersion engineering of broadband silicon nitride microresonator frequency combs.

Microresonator frequency combs, or microcombs, have gained wide appeal for their rich nonlinear physics and wide range of applications. Stoichiometric silicon nitride films grown via low-pressure chemical vapor deposition (LPCVD), in particular, are widely used in chip-integrated Kerr microcombs. Critical to such devices is the ability to control the microresonator dispersion, which has contributions from both material refractive index dispersion and geometric confinement. Here, we show that modifications to the ratio of the gaseous precursors in LPCVD growth have a significant impact on material dispersion and hence the overall microresonator dispersion. In contrast to the many efforts focused on comparisons between Si-rich films and stoichiometric (Si3N4) films, here, we focus on films whose precursor gas ratios should nominally place them in the stoichiometric regime. We further show that microresonator geometric dispersion can be tuned to compensate for changes in the material dispersion.

Automated on-axis direct laser writing of coupling elements for photonic chips.

Direct laser writing (DLW) has recently been used to create versatile micro-optic structures that facilitate photonic-chip coupling, like free-form lenses, free-form mirrors, and photonic wirebonds. However, at the edges of photonic chips, the top-down/off-axis printing orientation typically used limits the size and complexity of structures and the range of materials compatible with the DLW process. To avoid these issues, we develop a DLW method in which the photonic chip's optical input/output (IO) ports are co-linear with the axis of the lithography beam (on-axis printing). Alignment automation and port identification are enabled by a 1-dimensional barcode-like pattern that is fabricated within the chip's device layer and surrounds the IO waveguides to increase their visibility. We demonstrate passive alignment to these markers using standard machine vision techniques, and print single-element elliptical lenses along an array of 42 ports with a 100 % fabrication yield. These lenses improve fiber-to-chip misalignment tolerance relative to other fiber-based coupling techniques. The 1 dB excess loss diameter increases from ≈ 2.3 µm when using a lensed fiber to ≈ 9.9 µm when using the DLW printed micro-optic and a cleaved fiber. The insertion loss penalty introduced by moving to this misalignment-tolerant coupling approach is limited, with an additional loss (in comparison to the lensed fiber) as small as ≈1 dB and ≈2 dB on average. Going forward, on-axis printing can accommodate a variety of multi-element free-space and guided wave coupling elements, without requiring calibration of printing dose specific to the geometry of the 3D printed structure or to the materials comprising the photonic chip. It also enables novel methods for interconnection between chips. To that end, we fabricate a proof-of-concept 3D photonic wire bond between two vertically stacked photonic chips.

Broadband resonator-waveguide coupling for efficient extraction of octave-spanning microcombs: publisher's note.

This publisher's note contains corrections to Opt. Lett.44, 4737 (2019) OPLEDP0146-959210.1364/OL.44.004737.

Broadband resonator-waveguide coupling for efficient extraction of octave-spanning microcombs.

Octave-spanning frequency combs have been successfully demonstrated in Kerr nonlinear microresonators. These microcombs rely on both engineered dispersion, to enable generation of frequency components across the octave, and on engineered coupling, to efficiently extract the generated light into an access waveguide while maintaining a close to critically coupled pump. The latter is challenging, as the spatial overlap between the access waveguide and the ring modes decays with frequency. This leads to strong coupling variation across the octave, with poor extraction at short wavelengths. Here, we investigate how a waveguide wrapped around a portion of the resonator, in a pulley scheme, can improve the extraction of octave-spanning microcombs, in particular at short wavelengths. We use the coupled-mode theory to predict the performance of the pulley couplers and demonstrate good agreement with experimental measurements. Using an optimal pulley coupling design, we demonstrate a 20 dB improvement in extraction at short wavelengths compared to straight waveguide coupling.

Phased-locked two-color single soliton microcombs in dispersion-engineered Si3N4 resonators.

We propose and theoretically investigate a dispersion-engineered Si3N4 microring resonator, based on a cross section containing a partially-etched trench, that supports phase-locked, two-color soliton microcomb states. These soliton states consist of a single circulating intracavity pulse with a modulated envelope that sits on a continuous wave background. Such temporal waveforms produce a frequency comb whose spectrum is spread over two widely-spaced spectral windows, each exhibiting a squared hyperbolic secant envelope, with the two windows phase-locked to each other via Cherenkov radiation. The first spectral window is centered near the 1550 nm pump, while the second spectral window is tailored based on straightforward geometric control, and can be centered as short as 750 nm and as long as 3000 nm. We numerically analyze the robustness of the design to parameter variation, and consider its implications to self-referencing and visible wavelength comb generation.

Tunable mid-infrared generation via wide-band four-wave mixing in silicon nitride waveguides.

We demonstrate wide-band frequency down-conversion to the mid-infrared (MIR) using four-wave mixing (FWM) of near-infrared (NIR) femtosecond-duration pulses from an Er:fiber laser, corresponding to 100 THz spectral translation. Photonic-chip-based silicon nitride waveguides provide the FWM medium. Engineered dispersion in the nanophotonic geometry and the wide transparency range of silicon nitride enable large-detuning FWM phase-matching and results in tunable MIR from 2.6 to 3.6 µm on a single chip with 100-pJ-scale pump-pulse energies. Additionally, we observe up to 25 dB broadband parametric gain for NIR pulses when the FWM process is operated in a frequency up-conversion configuration. Our results demonstrate how integrated photonic circuits pumped with fiber lasers could realize multiple nonlinear optical phenomena on the same chip and lead to engineered synthesis of broadband, tunable, and coherent light across the NIR and MIR wavelength bands.

Interlocking Kerr-microresonator frequency combs for microwave to optical synthesis.

We report accurate phase stabilization of an interlocking pair of Kerr-microresonator frequency combs. The two combs, one based on silicon nitride and one on silica, feature nearly harmonic repetition frequencies and can be generated with one laser. The silicon-nitride comb supports an ultrafast-laser regime with three-optical-cycle, 1-picosecond-period soliton pulses and a total dispersive-wave-enhanced bandwidth of 170 THz, while providing a stable phase-link between optical and microwave frequencies. We demonstrate nanofabrication control of the silicon-nitride comb's carrier-envelope offset frequency and spectral profile. The phase-locked combs coherently reproduce their clock with a fractional precision of <6×10-13/τ, a behavior we verified through 2 h of measurement to reach <3×10-16. Our work establishes Kerr combs as a viable technology for applications like optical-atomic timekeeping and optical synchronization.

Quasi-Phase-Matched Supercontinuum Generation in Photonic Waveguides.

Supercontinuum generation (SCG) in integrated photonic waveguides is a versatile source of broadband light, and the generated spectrum is largely determined by the phase-matching conditions. Here we show that quasi-phase-matching via periodic modulations of the waveguide structure provides a useful mechanism to control the evolution of ultrafast pulses during supercontinuum generation. We experimentally demonstrate a quasi-phase-matched supercontinuum to the TE_{20} and TE_{00} waveguide modes, which enhances the intensity of the SCG in specific spectral regions by as much as 20 dB. We utilize higher-order quasi-phase-matching (up to the 16th order) to enhance the intensity in numerous locations across the spectrum. Quasi-phase-matching adds a unique dimension to the design space for SCG waveguides, allowing the spectrum to be engineered for specific applications.

Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies.

We investigate the collective dynamics and nondegenerate parametric resonance (NPR) of coplanar, interdigitated arrays of microcantilevers distinguished by their cantilevers having linearly expanding lengths and thus varying natural frequencies. Within a certain excitation frequency range, the resonators begin oscillating via NPR across the entire array consisting of 200 single-crystal silicon cantilevers. Tunable coupling generated from fringing electrostatic fields provides a mechanism to vary the scope of the NPR. Our experimental results are supported by a reduced-order model that reproduces the leading features of our data including the NPR band. The potential for tailoring the coupled response of suspended mechanical structures using NPR presents new possibilities in mass, force, and energy sensing applications, energy harvesting devices, and optomechanical systems.

Self-referenced frequency combs using high-efficiency silicon-nitride waveguides.

We utilize silicon-nitride waveguides to self-reference a telecom-wavelength fiber frequency comb through supercontinuum generation, using 11.3 mW of optical power incident on the chip. This is approximately 10 times lower than conventional approaches using nonlinear fibers and is enabled by low-loss (<2 dB) input coupling and the high nonlinearity of silicon nitride, which can provide two octaves of spectral broadening with incident energies of only 110 pJ. Following supercontinuum generation, self-referencing is accomplished by mixing 780-nm dispersive-wave light with the frequency-doubled output of the fiber laser. In addition, at higher optical powers, we demonstrate f-to-3f self-referencing directly from the waveguide output by the interference of simultaneous supercontinuum and third harmonic generation, without the use of an external doubling crystal or interferometer. These hybrid comb systems combine the performance of fiber-laser frequency combs with the high nonlinearity and compactness of photonic waveguides, and should lead to low-cost, fully stabilized frequency combs for portable and space-borne applications.

The Nanolithography Toolbox.

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro- and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

Traceable localization enables accurate integration of quantum emitters and photonic structures with high yield.

In a popular integration process for quantum information technologies, localization microscopy of quantum emitters guides lithographic placement of photonic structures. However, a complex coupling of microscopy and lithography errors degrades registration accuracy, severely limiting device performance and process yield. We introduce a methodology to solve this widespread but poorly understood problem. A new foundation of traceable localization enables rapid characterization of lithographic standards and comprehensive calibration of cryogenic microscopes, revealing and correcting latent systematic effects. Of particular concern, we discover that scale factor deviation and complex optical distortion couple to dominate registration errors. These novel results parameterize a process model for integrating quantum dots and bullseye resonators, predicting higher yield by orders of magnitude, depending on the Purcell factor threshold as a quantum performance metric. Our foundational methodology is a key enabler of the lab-to-fab transition of quantum information technologies and has broader implications to cryogenic and correlative microscopy.

Surface-Normal Free-Space Beam Projection via Slow-Light Standing-Wave Resonance Photonic Gratings.

On-chip grating couplers directly connect photonic circuits to free-space light. The commonly used photonic gratings have been specialized for small areas, specific intensity profiles, and nonvertical beam projection. This falls short of the precise and flexible wavefront control over large beam areas needed to empower emerging integrated miniaturized optical systems that leverage volumetric light-matter interactions, including trapping, cooling, and interrogation of atoms, bio- and chemi- sensing, and complex free-space interconnect. The large coupler size challenges general inverse design techniques, and solutions obtained by them are often difficult to physically understand and generalize. Here, by posing the problem to a carefully constrained computational inverse-design algorithm capable of large area structures, we discover a qualitatively new class of grating couplers. The numerically found solutions can be understood as coupling an incident photonic slab mode to a spatially extended slow-light (near-zero refractive index) region, backed by a reflector. The structure forms a spectrally broad standing wave resonance at the target wavelength, radiating vertically into free space. A reflectionless adiabatic transition critically couples the incident photonic mode to the resonance, and the numerically optimized lower cladding provides 70% overall theoretical conversion efficiency. We have experimentally validated an efficient surface normal collimated emission of ≈90 µm full width at half-maximum Gaussian at the thermally tunable operating wavelength of ≈780 nm. The variable-mesh-deformation inverse design approach scales to extra large photonic devices, while directly implementing the fabrication constraints. The deliberate choice of smooth parametrization resulted in a novel type of solution, which is both efficient and physically comprehensible.

Fourier Synthesis Dispersion Engineering of Photonic Crystal Microrings for Broadband Frequency Combs.

Dispersion engineering of microring resonators is crucial for optical frequency comb applications, to achieve targeted bandwidths and powers of individual comb teeth. However, conventional microrings only present two geometric degrees of freedom - width and thickness - which limits the degree to which dispersion can be controlled. We present a technique where we tune individual resonance frequencies for arbitrary dispersion tailoring. Using a photonic crystal microring resonator that induces coupling to both directions of propagation within the ring, we investigate an intuitive design based on Fourier synthesis. Here, the desired photonic crystal spatial profile is obtained through a Fourier relationship with the targeted modal frequency shifts, where each modal shift is determined based on the corresponding effective index modulation of the ring. Experimentally, we demonstrate several distinct dispersion profiles over dozens of modes in transverse magnetic polarization. In contrast, we find that the transverse electric polarization requires a more advanced model that accounts for the discontinuity of the field at the modulated interface. Finally, we present simulations showing arbitrary frequency comb spectral envelope tailoring using our Frequency synthesis approach.

Integrating planar photonics for multi-beam generation and atomic clock packaging on chip.

The commercialization of atomic technologies requires replacing laboratory-scale laser setups with compact and manufacturable optical platforms. Complex arrangements of free-space beams can be generated on chip through a combination of integrated photonics and metasurface optics. In this work, we combine these two technologies using flip-chip bonding and demonstrate an integrated optical architecture for realizing a compact strontium atomic clock. Our planar design includes twelve beams in two co-aligned magneto-optical traps. These beams are directed above the chip to intersect at a central location with diameters as large as 1 cm. Our design also includes two co-propagating beams at lattice and clock wavelengths. These beams emit collinearly and vertically to probe the center of the magneto-optical trap, where they will have diameters of ≈100 µm. With these devices we demonstrate that our integrated photonic platform is scalable to an arbitrary number of beams, each with different wavelengths, geometries, and polarizations.

Exceptional points in lossy media lead to deep polynomial wave penetration with spatially uniform power loss.

Waves entering a spatially uniform lossy medium typically undergo exponential intensity decay, arising from either the energy loss of the Beer-Lambert-Bouguer transmission law or the evanescent penetration during reflection. Recently, exceptional point singularities in non-Hermitian systems have been linked to unconventional wave propagation. Here, we theoretically propose and experimentally demonstrate exponential decay free wave propagation in a purely lossy medium. We observe up to 400-wave deep polynomial wave propagation accompanied by a uniformly distributed energy loss across a nanostructured photonic slab waveguide with exceptional points. We use coupled-mode theory and fully vectorial electromagnetic simulations to predict deep wave penetration manifesting spatially constant radiation losses through the entire structured waveguide region regardless of its length. The uncovered exponential decay free wave phenomenon is universal and holds true across all domains supporting physical waves, finding immediate applications for generating large, uniform and surface-normal free-space plane waves directly from dispersion-engineered photonic chip surfaces.