Enhanced Thermo-Mechanical Reliability of Ultralow-K Dielectrics with Self-Organized Molecular Pores.

Sa, Y K; Bang, Junghwan; Son, Junhyuk; Yu, Dong-Yurl; Kim, Yun-Chan.

Afiliação

Sa YK; Advanced Deposition Materials Business Unit, Entegris, Suwon 16229, Korea.
Bang J; Micro-Joining Center, Korea Institute of Industrial Technology, 156 Gaetbeol-ro, Yeonsu-gu, Incheon 406840, Korea.
Son J; Micro-Joining Center, Korea Institute of Industrial Technology, 156 Gaetbeol-ro, Yeonsu-gu, Incheon 406840, Korea.
Yu DY; Department of Material Science and Engineering, Korea University, Anam-dong, Seongbuk-gu, Seoul 136713, Korea.
Kim YC; Micro-Joining Center, Korea Institute of Industrial Technology, 156 Gaetbeol-ro, Yeonsu-gu, Incheon 406840, Korea.

Materials (Basel) ; 14(9)2021 Apr 28.

Article em En | MEDLINE | ID: mdl-33925006