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Investigation of correlative parameters to evaluate EUV lithographic performance of PMMA.
Kim, Kanghyun; Lee, Jong-Won; Park, Byeong-Gyu; Oh, Hyun-Taek; Ku, Yejin; Lee, Jin-Kyun; Lim, Geunbae; Lee, Sangsul.
Afiliação
  • Kim K; Department of Mechanical Engineering, POSTECH Pohang 37673 Republic of Korea.
  • Lee JW; Pohang Accelerator Laboratory, POSTECH Pohang 37673 Republic of Korea sangsul@postech.ac.kr.
  • Park BG; Pohang Accelerator Laboratory, POSTECH Pohang 37673 Republic of Korea sangsul@postech.ac.kr.
  • Oh HT; Pohang Accelerator Laboratory, POSTECH Pohang 37673 Republic of Korea sangsul@postech.ac.kr.
  • Ku Y; Department of Polymer Engineering, Inha University Incheon 22212 Republic of Korea.
  • Lee JK; Program in Environmental and Polymer Engineering, Inha University Incheon 22212 Republic of Korea.
  • Lim G; Department of Polymer Engineering, Inha University Incheon 22212 Republic of Korea.
  • Lee S; Program in Environmental and Polymer Engineering, Inha University Incheon 22212 Republic of Korea.
RSC Adv ; 12(5): 2589-2594, 2022 Jan 18.
Article em En | MEDLINE | ID: mdl-35425284
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Texto completo: 1 Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Ano de publicação: 2022 Tipo de documento: Article
Texto completo
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PubMed Links
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Texto completo: 1 Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Ano de publicação: 2022 Tipo de documento: Article