Improving Spatial and Elemental Associations in Analytical Field Ion Microscopy.

Chemically resolved atomic resolution imaging can give fundamental information about material properties. However, even today, a technique capable of such achievement is still only an ambition. Here, we take further steps in developing the analytical field ion microscopy (aFIM), which combines the atomic spatial resolution of field ion microscopy (FIM) with the time-of-flight spectrometry of atom probe tomography (APT). To improve the performance of aFIM that are limited in part by a high level of background, we implement bespoke flight path time-of-flight corrections normalized by the ion flight distances traversed in electrostatic simulations modeled explicitly for an atom probe chamber. We demonstrate effective filtering in the field evaporation events upon spatially and temporally correlated multiples, increasing the mass spectrum's signal-to-background. In an analysis of pure tungsten, mass peaks pertaining to individual W isotopes can be distinguished and identified, with the signal-to-background improving by three orders of magnitude over the raw data. We also use these algorithms for the analysis of a CoTaB amorphous film to demonstrate application of aFIM beyond pure metals and binary alloys. These approaches facilitate elemental identification of the FIM-imaged surface atoms, making analytical FIM more precise and reliable.

Dynamic Effects in Voltage Pulsed Atom Probe.

Atom probe tomography (APT) is particularly suited for the analysis of nanoscale microstructural features in metallic alloys. APT has become important in the quantitative assessment at high spatial resolution of light elements, which are notoriously difficult to analyze by electron- or X-ray-based techniques. These control the physical properties of high-strength materials and semiconductors. However, the mass spectrometer of state-of-the-art commercial atom probes with the highest spatial precision and detection efficiency are optimized for elements with mass-to-charge ratios corresponding to Fe and neighboring elements. Little is known on the theoretical performances for light elements. Here, we discuss the theoretical instrumental performance of one such instrument using accurate three-dimensional transient electrostatic simulations in a time-varying field approach. We compare the simulations to experimental measurements obtained on an FeBSi bulk-metallic glass. Dynamics effects during the ion's flight are revealed when examining multi-hit mass-to-charge correlations, and we demonstrate their influence on the mass resolution. The model reveals significant differences in ion projection as a function of the mass. We discuss how these chromatic aberrations affect the spatial precision. This approach shows that by tuning the shape of the voltage pulses used to trigger field evaporation, minimizing the influence of these detrimental dynamic effects is possible.