Design and performance of capping layers for extreme-ultraviolet multilayer mirrors.

Bajt, Sasa; Chapman, Henry N; Nguyen, Nhan; Alameda, Jennifer; Robinson, Jeffrey C; Malinowski, Michael; Gullikson, Eric; Aquila, Andrew; Tarrio, Charles; Grantham, Steven

Bajt, Sasa; Chapman, Henry N; Nguyen, Nhan; Alameda, Jennifer; Robinson, Jeffrey C; Malinowski, Michael; Gullikson, Eric; Aquila, Andrew; Tarrio, Charles; Grantham, Steven.

Affiliation

Bajt S; Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA. bajt@llnl.gov

Appl Opt ; 42(28): 5750-8, 2003 Oct 01.

Article in En | MEDLINE | ID: mdl-14528939

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