In situ reflectance and optical constants of ion-beam-sputtered SiC films in the 58.4 to 149.2 nm region.

Fernández-Perea, Mónica; Méndez, José A; Aznárez, José A; Larruquert, Juan I.

Affiliation

Fernández-Perea M; GOLD-Instituto de Física Aplicada-Consejo Superior de Investigaciones Científicas, C/ Serrano 144, 28006 Madrid, Spain.

Appl Opt ; 48(24): 4698-702, 2009 Aug 20.

Article in En | MEDLINE | ID: mdl-19696857

Search on Google

Database: MEDLINE Language: En Year: 2009 Type: Article

Database: MEDLINE Language: En Year: 2009 Type: Article