Wafer-scale integrated micro-supercapacitors on an ultrathin and highly flexible biomedical platform.
Biomed Microdevices
; 17(1): 7, 2015 Feb.
Article
in En
| MEDLINE
| ID: mdl-25653069
ABSTRACT
We present wafer-scale integrated micro-supercapacitors on an ultrathin and highly flexible parylene platform, as progress toward sustainably powering biomedical microsystems suitable for implantable and wearable applications. All-solid-state, low-profile (<30 µm), and high-density (up to ~500 µF/mm(2)) micro-supercapacitors are formed on an ultrathin (~20 µm) freestanding parylene film by a wafer-scale parylene packaging process in combination with a polyaniline (PANI) nanowire growth technique assisted by surface plasma treatment. These micro-supercapacitors are highly flexible and shown to be resilient toward flexural stress. Further, direct integration of micro-supercapacitors into a radio frequency (RF) rectifying circuit is achieved on a single parylene platform, yielding a complete RF energy harvesting microsystem. The system discharging rate is shown to improve by ~17 times in the presence of the integrated micro-supercapacitors. This result suggests that the integrated micro-supercapacitor technology described herein is a promising strategy for sustainably powering biomedical microsystems dedicated to implantable and wearable applications.
Full text:
1
Database:
MEDLINE
Main subject:
Electric Capacitance
/
Nanowires
/
Remote Sensing Technology
/
Membranes, Artificial
Language:
En
Year:
2015
Type:
Article