Improved sensing characteristics of dual-gate transistor sensor using silicon nanowire arrays defined by nanoimprint lithography.

Lim, Cheol-Min; Lee, In-Kyu; Lee, Ki Joong; Oh, Young Kyoung; Shin, Yong-Beom; Cho, Won-Ju.

Affiliation

Lim CM; Department of Electronic Materials Engineering, Kwangwoon University , Seoul , Republic of Korea.
Lee IK; Hazards Monitoring BioNano Research Center, Korea Research Institute of Bioscience & Biotechnology (KRIBB) , Daejeon , Republic of Korea.
Lee KJ; Hazards Monitoring BioNano Research Center, Korea Research Institute of Bioscience & Biotechnology (KRIBB) , Daejeon , Republic of Korea.
Oh YK; Hazards Monitoring BioNano Research Center, Korea Research Institute of Bioscience & Biotechnology (KRIBB) , Daejeon , Republic of Korea.
Shin YB; Hazards Monitoring BioNano Research Center, Korea Research Institute of Bioscience & Biotechnology (KRIBB) , Daejeon , Republic of Korea.
Cho WJ; Department of Electronic Materials Engineering, Kwangwoon University , Seoul , Republic of Korea.

Sci Technol Adv Mater ; 18(1): 17-25, 2017.

Article in En | MEDLINE | ID: mdl-28179955

Key words

201 Electronics; 40 Optical; 600 Others: electronic device; Dual-gate field-effect transistor; Semiconductor / TCOs; capacitive coupling; ion-sensitive field-effect transistor; magnetic and electronic device materials; nanoimprint lithography; pH sensor; silicon nanowire

Full text: 1 Database: MEDLINE Language: En Year: 2017 Type: Article

Full text: 1 Database: MEDLINE Language: En Year: 2017 Type: Article