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Deep X-ray lithography on "sol-gel" processed noble metal mesoarchitectured films.
Gayrard, Maxime; Marmiroli, Benedetta; Chancerel, Francois; Decorse, Philippe; Amenitsch, Heinz; Peron, Jennifer; Cattoni, Andrea; Faustini, Marco.
Affiliation
  • Gayrard M; Sorbonne Université, CNRS, Laboratoire Chimie de la Matière Condensée de Paris (LCMCP), F-75005 Paris, France. marco.faustini@sorbonne-universite.fr.
  • Marmiroli B; Institute of Inorganic Chemistry, Graz University of Technology, Graz, Austria.
  • Chancerel F; Sorbonne Université, CNRS, Laboratoire Chimie de la Matière Condensée de Paris (LCMCP), F-75005 Paris, France. marco.faustini@sorbonne-universite.fr.
  • Decorse P; Institut Photovoltaïque d'Ile-de-France (IPVF), CNRS UMR 9006, Palaiseau, France.
  • Amenitsch H; Centre de Nanosciences et de Nanotechnologies (C2N), CNRS UMR 9001, Université Paris-Saclay, Palaiseau, France.
  • Peron J; Université de Paris, ITODYS, CNRS, UMR 7086, 15 rue J-A de Baïf, F-75013 Paris, France.
  • Cattoni A; Institute of Inorganic Chemistry, Graz University of Technology, Graz, Austria.
  • Faustini M; Université de Paris, ITODYS, CNRS, UMR 7086, 15 rue J-A de Baïf, F-75013 Paris, France.
Nanoscale ; 14(5): 1706-1712, 2022 Feb 03.
Article in En | MEDLINE | ID: mdl-35043816
ABSTRACT
Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol-gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.
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Full text: 1 Database: MEDLINE Language: En Year: 2022 Type: Article
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Full text: 1 Database: MEDLINE Language: En Year: 2022 Type: Article