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Synthesis of Mg and Zn diolates and their use in metal oxide deposition.
Frenzel, Peter; Preuß, Andrea; Bankwitz, Jörn; Georgi, Colin; Ganss, Fabian; Mertens, Lutz; Schulz, Stefan E; Hellwig, Olav; Mehring, Michael; Lang, Heinrich.
Affiliation
  • Frenzel P; Technische Universität Chemnitz, Faculty of Natural Sciences, Institute of Chemistry, Inorganic Chemistry D-09107 Chemnitz Germany heinrich.lang@chemie.tu-chemnitz.de +49(0)371-531-21219 +49(0)371-531-21210.
  • Preuß A; Technische Universität Chemnitz, Faculty of Natural Sciences, Institute of Chemistry, Inorganic Chemistry D-09107 Chemnitz Germany heinrich.lang@chemie.tu-chemnitz.de +49(0)371-531-21219 +49(0)371-531-21210.
  • Bankwitz J; Fraunhofer Institute for Electronic Nano Systems (ENAS), Technologie-Campus 3 D-09126 Chemnitz Germany.
  • Georgi C; Fraunhofer Institute for Electronic Nano Systems (ENAS), Technologie-Campus 3 D-09126 Chemnitz Germany.
  • Ganss F; Technische Universität Chemnitz, Faculty of Natural Sciences, Institute of Physics D-09107 Chemnitz Germany.
  • Mertens L; Technische Universität Chemnitz, Faculty of Natural Sciences, Institute of Chemistry, Coordination Chemistry D-09107 Chemnitz Germany.
  • Schulz SE; Fraunhofer Institute for Electronic Nano Systems (ENAS), Technologie-Campus 3 D-09126 Chemnitz Germany.
  • Hellwig O; Technische Universität Chemnitz, Center for Microtechnologies D-09107 Chemnitz Germany.
  • Mehring M; Technische Universität Chemnitz, Faculty of Natural Sciences, Institute of Physics D-09107 Chemnitz Germany.
  • Lang H; Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research D-01328 Dresden Germany.
RSC Adv ; 9(19): 10657-10669, 2019 Apr 03.
Article in En | MEDLINE | ID: mdl-35515315
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Full text: 1 Database: MEDLINE Language: En Year: 2019 Type: Article
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Full text: 1 Database: MEDLINE Language: En Year: 2019 Type: Article